JPH0365987U - - Google Patents

Info

Publication number
JPH0365987U
JPH0365987U JP12729789U JP12729789U JPH0365987U JP H0365987 U JPH0365987 U JP H0365987U JP 12729789 U JP12729789 U JP 12729789U JP 12729789 U JP12729789 U JP 12729789U JP H0365987 U JPH0365987 U JP H0365987U
Authority
JP
Japan
Prior art keywords
module
controller
test head
test
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12729789U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12729789U priority Critical patent/JPH0365987U/ja
Publication of JPH0365987U publication Critical patent/JPH0365987U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す構成説明図、
第２図はテストヘツドの構成斜視図、第３図は要
部の電気配線の構成図、第４図は本考案の半導体
測定装置の動作を説明する説明図である。 １０……テスタ本体、１１……コントローラー
、１２……光フアイバーバス、２０……テストヘ
ツド、２１……ＤＵＴ、２３……光インターフエ
イス・モジユール、２４……ＤＣモジユール、２
５……ＦＣモジユール、２８……切換スイツチ。 FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention;
FIG. 2 is a perspective view of the configuration of the test head, FIG. 3 is a configuration diagram of the main electrical wiring, and FIG. 4 is an explanatory diagram illustrating the operation of the semiconductor measuring device of the present invention. 10... Tester body, 11... Controller, 12... Optical fiber bus, 20... Test head, 21... DUT, 23... Optical interface module, 24... DC module, 2
5... FC module, 28... changeover switch.

Claims (1)

【実用新案登録請求の範囲】 テスタ本体のコントローラーと別体に設けたテ
ストヘツドを介して検査対象のＩＣとテスト信号
を授受する半導体検査装置において、 前記コントローラーと前記テストヘツドは光フ
アイバーバスによつてテスト信号が授受されるよ
うになつていて、 前記テストヘツドは、 前記光フアイバーバスに結合する光インターフ
エイス・モジユールと、 光インターフエイス・モジユールに結合し、前
記コントローラー側から送られたＤＣテスト信号
をＩＣに与え、ＩＣから出力されたテスト信号を
測定するＤＣモジユールと、 前記光インターフエイス・モジユールに結合し
、前記コントローラーから送られたデジタルテス
ト信号をＩＣに与え、ＩＣから出力されたテスト
信号を測定するフアンクシヨン・モジユールと 前記ＤＣモジユールとＩＣ、前記フアンクシヨ
ン・モジユールとＩＣとの接続を前記コントロー
ラーからの指示に基づいて切換える切換スイツチ
、 を有したことを特徴とする半導体検査装置。[Scope of Claim for Utility Model Registration] In a semiconductor testing device that sends and receives test signals to and from an IC to be tested via a test head provided separately from a controller of the tester main body, the controller and the test head are tested by an optical fiber bus. The test head is configured to send and receive signals, and the test head includes an optical interface module that is coupled to the optical fiber bus; a DC module coupled to the optical interface module, configured to apply the digital test signal sent from the controller to the IC and measure the test signal output from the IC; A semiconductor inspection device comprising: a function module for controlling the DC module and an IC; and a switch for switching connections between the DC module and the IC, and the function module and the IC based on an instruction from the controller.
JP12729789U 1989-10-31 1989-10-31 Pending JPH0365987U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12729789U JPH0365987U (en) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12729789U JPH0365987U (en) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0365987U true JPH0365987U (en) 1991-06-26

Family

ID=31675057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12729789U Pending JPH0365987U (en) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0365987U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998022829A1 (en) * 1996-11-15 1998-05-28 Advantest Corporation Integrated circuit device tester

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59500891A (en) * 1982-05-24 1984-05-17 マイクロ　コンポ−ネント　テクノロジ−．インコ−ポレイテイド Integrated circuit testing equipment
JPS60219571A (en) * 1984-04-16 1985-11-02 Yokogawa Hokushin Electric Corp Analogue lsi tester
JPS61117472A (en) * 1984-11-13 1986-06-04 Yokogawa Electric Corp Test system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59500891A (en) * 1982-05-24 1984-05-17 マイクロ　コンポ−ネント　テクノロジ−．インコ−ポレイテイド Integrated circuit testing equipment
JPS60219571A (en) * 1984-04-16 1985-11-02 Yokogawa Hokushin Electric Corp Analogue lsi tester
JPS61117472A (en) * 1984-11-13 1986-06-04 Yokogawa Electric Corp Test system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998022829A1 (en) * 1996-11-15 1998-05-28 Advantest Corporation Integrated circuit device tester
GB2322203A (en) * 1996-11-15 1998-08-19 Advantest Corp Integrated circuit device tester

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