JPH0365987U - - Google Patents
Info
- Publication number
- JPH0365987U JPH0365987U JP12729789U JP12729789U JPH0365987U JP H0365987 U JPH0365987 U JP H0365987U JP 12729789 U JP12729789 U JP 12729789U JP 12729789 U JP12729789 U JP 12729789U JP H0365987 U JPH0365987 U JP H0365987U
- Authority
- JP
- Japan
- Prior art keywords
- module
- controller
- test head
- test
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009429 electrical wiring Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第1図は本考案の一実施例を示す構成説明図、
第2図はテストヘツドの構成斜視図、第3図は要
部の電気配線の構成図、第4図は本考案の半導体
測定装置の動作を説明する説明図である。
10……テスタ本体、11……コントローラー
、12……光フアイバーバス、20……テストヘ
ツド、21……DUT、23……光インターフエ
イス・モジユール、24……DCモジユール、2
5……FCモジユール、28……切換スイツチ。
FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention;
FIG. 2 is a perspective view of the configuration of the test head, FIG. 3 is a configuration diagram of the main electrical wiring, and FIG. 4 is an explanatory diagram illustrating the operation of the semiconductor measuring device of the present invention. 10... Tester body, 11... Controller, 12... Optical fiber bus, 20... Test head, 21... DUT, 23... Optical interface module, 24... DC module, 2
5... FC module, 28... changeover switch.
Claims (1)
ストヘツドを介して検査対象のICとテスト信号
を授受する半導体検査装置において、 前記コントローラーと前記テストヘツドは光フ
アイバーバスによつてテスト信号が授受されるよ
うになつていて、 前記テストヘツドは、 前記光フアイバーバスに結合する光インターフ
エイス・モジユールと、 光インターフエイス・モジユールに結合し、前
記コントローラー側から送られたDCテスト信号
をICに与え、ICから出力されたテスト信号を
測定するDCモジユールと、 前記光インターフエイス・モジユールに結合し
、前記コントローラーから送られたデジタルテス
ト信号をICに与え、ICから出力されたテスト
信号を測定するフアンクシヨン・モジユールと 前記DCモジユールとIC、前記フアンクシヨ
ン・モジユールとICとの接続を前記コントロー
ラーからの指示に基づいて切換える切換スイツチ
、 を有したことを特徴とする半導体検査装置。[Scope of Claim for Utility Model Registration] In a semiconductor testing device that sends and receives test signals to and from an IC to be tested via a test head provided separately from a controller of the tester main body, the controller and the test head are tested by an optical fiber bus. The test head is configured to send and receive signals, and the test head includes an optical interface module that is coupled to the optical fiber bus; a DC module coupled to the optical interface module, configured to apply the digital test signal sent from the controller to the IC and measure the test signal output from the IC; A semiconductor inspection device comprising: a function module for controlling the DC module and an IC; and a switch for switching connections between the DC module and the IC, and the function module and the IC based on an instruction from the controller.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12729789U JPH0365987U (en) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12729789U JPH0365987U (en) | 1989-10-31 | 1989-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0365987U true JPH0365987U (en) | 1991-06-26 |
Family
ID=31675057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12729789U Pending JPH0365987U (en) | 1989-10-31 | 1989-10-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0365987U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998022829A1 (en) * | 1996-11-15 | 1998-05-28 | Advantest Corporation | Integrated circuit device tester |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59500891A (en) * | 1982-05-24 | 1984-05-17 | マイクロ コンポ−ネント テクノロジ−.インコ−ポレイテイド | Integrated circuit testing equipment |
JPS60219571A (en) * | 1984-04-16 | 1985-11-02 | Yokogawa Hokushin Electric Corp | Analogue lsi tester |
JPS61117472A (en) * | 1984-11-13 | 1986-06-04 | Yokogawa Electric Corp | Test system |
-
1989
- 1989-10-31 JP JP12729789U patent/JPH0365987U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59500891A (en) * | 1982-05-24 | 1984-05-17 | マイクロ コンポ−ネント テクノロジ−.インコ−ポレイテイド | Integrated circuit testing equipment |
JPS60219571A (en) * | 1984-04-16 | 1985-11-02 | Yokogawa Hokushin Electric Corp | Analogue lsi tester |
JPS61117472A (en) * | 1984-11-13 | 1986-06-04 | Yokogawa Electric Corp | Test system |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998022829A1 (en) * | 1996-11-15 | 1998-05-28 | Advantest Corporation | Integrated circuit device tester |
GB2322203A (en) * | 1996-11-15 | 1998-08-19 | Advantest Corp | Integrated circuit device tester |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0365987U (en) | ||
JPH08179011A (en) | Pin testing circuit for semiconductor test device | |
JPH0361588U (en) | ||
JPH052869Y2 (en) | ||
JPH0438307Y2 (en) | ||
JPH0361339U (en) | ||
GB2268277B (en) | Improvements in or relating to electronic circuit test apparatus | |
JPH02113177U (en) | ||
JPS6430459U (en) | ||
JPH02150582U (en) | ||
JPH0415075U (en) | ||
JPS6354080U (en) | ||
JPS6417476U (en) | ||
JPS59228177A (en) | Test head with dc measuring function for ic tester | |
JPH02118280U (en) | ||
JPH02128475U (en) | ||
JPH04332883A (en) | Ic testing device | |
JPS642173U (en) | ||
JPS61144476U (en) | ||
JPS6350077U (en) | ||
JPH0449882U (en) | ||
JPS63152571U (en) | ||
JPS5978978U (en) | Photovoltage measuring device | |
JPS63101875U (en) | ||
JPH0363933U (en) |