JPH01152267U - - Google Patents
Info
- Publication number
- JPH01152267U JPH01152267U JP4900688U JP4900688U JPH01152267U JP H01152267 U JPH01152267 U JP H01152267U JP 4900688 U JP4900688 U JP 4900688U JP 4900688 U JP4900688 U JP 4900688U JP H01152267 U JPH01152267 U JP H01152267U
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- voltage
- current
- inspection device
- test object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 11
- 238000012360 testing method Methods 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 101100477837 Arabidopsis thaliana SMU2 gene Proteins 0.000 description 1
- 101100477827 Caenorhabditis elegans smu-1 gene Proteins 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
Description
第１図は本考案に係る検査装置における計測ユ
ニツトの一実施例を示す要部構成図、第２図はト
ランジスタの特性試験の場合の測定原理を説明す
るための図、第３図は他の特性試験の場合の測定
原理を説明するための図、第４図は従来の検査装
置の一例を示す構成図、第５図は従来装置による
トランジスタの特性試験の場合の構成を示す図で
ある。
ＣＣ……主コントローラ、ＣＵ……コントロー
ル・ユニツト、ＳＭＵ……計測ユニツト、ＳＭＵ
１，ＳＭＵ２，ＳＭＵ３……計測カード、ＴＲ…
…トランジスタ。
Fig. 1 is a main part configuration diagram showing one embodiment of the measurement unit in the inspection device according to the present invention, Fig. 2 is a diagram for explaining the measurement principle in the case of transistor characteristic testing, and Fig. 3 is a diagram showing other measurement units. FIG. 4 is a diagram illustrating the measurement principle for a characteristic test, FIG. 4 is a configuration diagram showing an example of a conventional inspection device, and FIG. 5 is a diagram showing the configuration of a transistor characteristic test using the conventional device. CC...Main controller, CU...Control unit, SMU...Measurement unit, SMU
1, SMU2, SMU3...Measurement card, TR...
...transistor.
Claims (1)
発生させると共にその発生電圧または電流を測定
することができるように構成された計測カードを
複数個組合わせて計測ユニツトを構成し、被試験
物にアナログ電圧あるいはアナログ電流を印加し
、その時の計測カードの出力を測定することによ
り被試験物の良否等を検査することのできる検査
装置において、 前記計測ユニツトの各計測カードを、相互にデ
ータ補正のできる機能を含むように構成したこと
を特徴とする検査装置。[Claims for Utility Model Registration] A measurement unit is configured by combining a plurality of measurement cards configured to generate a constant value of voltage or current using an externally set voltage and to measure the generated voltage or current. In an inspection device capable of inspecting the quality of a test object by applying an analog voltage or analog current to the test object and measuring the output of the measurement card at that time, each measurement card of the measurement unit is provided. , an inspection device characterized in that it is configured to include functions that allow mutual data correction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4900688U JPH01152267U (en) | 1988-04-12 | 1988-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4900688U JPH01152267U (en) | 1988-04-12 | 1988-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01152267U true JPH01152267U (en) | 1989-10-20 |
Family
ID=31275128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4900688U Pending JPH01152267U (en) | 1988-04-12 | 1988-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01152267U (en) |
-
1988
- 1988-04-12 JP JP4900688U patent/JPH01152267U/ja active Pending
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