JPS6427151A - Measuring device - Google Patents

Measuring device

Info

Publication number
JPS6427151A
JPS6427151A JP62181174A JP18117487A JPS6427151A JP S6427151 A JPS6427151 A JP S6427151A JP 62181174 A JP62181174 A JP 62181174A JP 18117487 A JP18117487 A JP 18117487A JP S6427151 A JPS6427151 A JP S6427151A
Authority
JP
Japan
Prior art keywords
specimen
electrons
reflex
diffuse plate
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62181174A
Other languages
Japanese (ja)
Inventor
Yoshikazu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62181174A priority Critical patent/JPS6427151A/en
Publication of JPS6427151A publication Critical patent/JPS6427151A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enhance the picture quality by fitting a reflex electron diffuse plate between an objective lens and a secondary electron sensor, and hindering the reflex electrons generated from a solid specimen from incidence again to the specimen, or reducing the amount of reflex electrons incident again to the specimen. CONSTITUTION:On the surface of a reflex electron diffuse plate 6, electrons B reflected at a specimen X are diffused as shown by C so as not to make incidence again to the specimen X easily, and the surface shall be processed uneven for the beam no to make direct incidence to a secondary electron emitting device 5. This diffuse plate 6 consists either of single structure of metal, ceramic, organic substance, etc., or of a multi-layer structure in combination of metal, ceramic, organic substance, etc., and its surface is formed from good electroconductive material. The diffuse plate 6 is off contact from the device body electrically, and the surface is charged, for ex., at 3-5V to trap the secondary electrons b generated at the diffuse plate 6 for the secondary electron sensor 5 not to catch them. Thus the picture quality is enhanced by trapping the secondary electrons b and reducing the secondary electrons due to reflex electrons which have made reincidence by the specimen X.
JP62181174A 1987-07-22 1987-07-22 Measuring device Pending JPS6427151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62181174A JPS6427151A (en) 1987-07-22 1987-07-22 Measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62181174A JPS6427151A (en) 1987-07-22 1987-07-22 Measuring device

Publications (1)

Publication Number Publication Date
JPS6427151A true JPS6427151A (en) 1989-01-30

Family

ID=16096177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62181174A Pending JPS6427151A (en) 1987-07-22 1987-07-22 Measuring device

Country Status (1)

Country Link
JP (1) JPS6427151A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5673743A (en) * 1994-12-26 1997-10-07 Toyota Jidosha Kabushiki Kaisha Method of molding complete core from base core and bonded core

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5673743A (en) * 1994-12-26 1997-10-07 Toyota Jidosha Kabushiki Kaisha Method of molding complete core from base core and bonded core

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