JPS6427151A - Measuring device - Google Patents
Measuring deviceInfo
- Publication number
- JPS6427151A JPS6427151A JP62181174A JP18117487A JPS6427151A JP S6427151 A JPS6427151 A JP S6427151A JP 62181174 A JP62181174 A JP 62181174A JP 18117487 A JP18117487 A JP 18117487A JP S6427151 A JPS6427151 A JP S6427151A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- electrons
- reflex
- diffuse plate
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enhance the picture quality by fitting a reflex electron diffuse plate between an objective lens and a secondary electron sensor, and hindering the reflex electrons generated from a solid specimen from incidence again to the specimen, or reducing the amount of reflex electrons incident again to the specimen. CONSTITUTION:On the surface of a reflex electron diffuse plate 6, electrons B reflected at a specimen X are diffused as shown by C so as not to make incidence again to the specimen X easily, and the surface shall be processed uneven for the beam no to make direct incidence to a secondary electron emitting device 5. This diffuse plate 6 consists either of single structure of metal, ceramic, organic substance, etc., or of a multi-layer structure in combination of metal, ceramic, organic substance, etc., and its surface is formed from good electroconductive material. The diffuse plate 6 is off contact from the device body electrically, and the surface is charged, for ex., at 3-5V to trap the secondary electrons b generated at the diffuse plate 6 for the secondary electron sensor 5 not to catch them. Thus the picture quality is enhanced by trapping the secondary electrons b and reducing the secondary electrons due to reflex electrons which have made reincidence by the specimen X.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181174A JPS6427151A (en) | 1987-07-22 | 1987-07-22 | Measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181174A JPS6427151A (en) | 1987-07-22 | 1987-07-22 | Measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6427151A true JPS6427151A (en) | 1989-01-30 |
Family
ID=16096177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62181174A Pending JPS6427151A (en) | 1987-07-22 | 1987-07-22 | Measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6427151A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5673743A (en) * | 1994-12-26 | 1997-10-07 | Toyota Jidosha Kabushiki Kaisha | Method of molding complete core from base core and bonded core |
-
1987
- 1987-07-22 JP JP62181174A patent/JPS6427151A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5673743A (en) * | 1994-12-26 | 1997-10-07 | Toyota Jidosha Kabushiki Kaisha | Method of molding complete core from base core and bonded core |
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