JPS57212756A - Secondary-electron detector installed in scanning electron microscope - Google Patents

Secondary-electron detector installed in scanning electron microscope

Info

Publication number
JPS57212756A
JPS57212756A JP56097882A JP9788281A JPS57212756A JP S57212756 A JPS57212756 A JP S57212756A JP 56097882 A JP56097882 A JP 56097882A JP 9788281 A JP9788281 A JP 9788281A JP S57212756 A JPS57212756 A JP S57212756A
Authority
JP
Japan
Prior art keywords
detector
sample
reflector
conductive member
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56097882A
Other languages
Japanese (ja)
Inventor
Shizuya Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56097882A priority Critical patent/JPS57212756A/en
Publication of JPS57212756A publication Critical patent/JPS57212756A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)

Abstract

PURPOSE:To increase the proportion of secondary electrons catched by a secondary- electron detector after developing from a test sample by providing a secondary-electron reflector, which is made of a conductive member and to which a negative electric potential is applied, on the opposite side to the said detector close to the sample. CONSTITUTION:A secondary-electron detector is installed close to a test sample 3, and a disk-like or semi-spherical shell-like conductive member 9 is installed on the opposite side to the detector. In addition, a negative electric potential is applied to the conductive member 9. As the result, secondary electrons developing from the sample 3 are efficiently taken into a scintillator 6 due to the electric field formed among the conductive member 9, the sample 3 and corona rings 5. Besides, secondary electrons discharged in the opposite direction of the detector, especially, can be very efficiently catched by the detector. A secondary-electron reflector consisting of the above conductive member 9 has a semi-spherical shell-like shape, and a small hole 10 is provided in the reflector so that the hole 10 is somewhat apart from the center of the reflector. The hole 10 is used for passing electrons before they become incident upon the sample 3. The reflector is prepared by coating a conductive or non-conductive plastic with a thin conductive film.
JP56097882A 1981-06-24 1981-06-24 Secondary-electron detector installed in scanning electron microscope Pending JPS57212756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56097882A JPS57212756A (en) 1981-06-24 1981-06-24 Secondary-electron detector installed in scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56097882A JPS57212756A (en) 1981-06-24 1981-06-24 Secondary-electron detector installed in scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS57212756A true JPS57212756A (en) 1982-12-27

Family

ID=14204113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56097882A Pending JPS57212756A (en) 1981-06-24 1981-06-24 Secondary-electron detector installed in scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57212756A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197575A (en) * 1984-10-19 1986-05-16 Jeol Ltd Potential measuring apparatus using electron beams

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197575A (en) * 1984-10-19 1986-05-16 Jeol Ltd Potential measuring apparatus using electron beams

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