JPS5689040A - Evacuated leak detector - Google Patents
Evacuated leak detectorInfo
- Publication number
- JPS5689040A JPS5689040A JP16715579A JP16715579A JPS5689040A JP S5689040 A JPS5689040 A JP S5689040A JP 16715579 A JP16715579 A JP 16715579A JP 16715579 A JP16715579 A JP 16715579A JP S5689040 A JPS5689040 A JP S5689040A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- operator
- magnetic field
- slits
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
PURPOSE: To enable various kinds of M/q (M: mass number of ion, q: valence number of ion) to be detected and make leak detection easy by providing means for detecting the ratios of the mass number of gaseous particles of a plurality of different gaseous molecules and ion valence almost simultaneously and an operator which comparatively processes the detected values thereof.
CONSTITUTION: The ions from an electrode 9 are led to a deflecting magnetic field 11, obtain fixed energy by the lead-out voltage, receive deflection in the magnetic field, and pass slits 19. A plurality of the slits 19 are opened according to the curvature of deflection, and a plurality of Faraday cups 17a, 17b, 17c are provided in correspondence to the respective slit openings. The outputs thereof are applied to an operator 18, the values comparatively processed whereby are sent to a comparative decision circuit 20, where they are compared with the output of a reference setter 19. As a result, the presence or absence of leakage is easily decided.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16715579A JPS5689040A (en) | 1979-12-21 | 1979-12-21 | Evacuated leak detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16715579A JPS5689040A (en) | 1979-12-21 | 1979-12-21 | Evacuated leak detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5689040A true JPS5689040A (en) | 1981-07-20 |
Family
ID=15844434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16715579A Pending JPS5689040A (en) | 1979-12-21 | 1979-12-21 | Evacuated leak detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5689040A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61165443U (en) * | 1985-04-03 | 1986-10-14 | ||
| JPS62144039A (en) * | 1985-12-18 | 1987-06-27 | Ulvac Corp | Helium leak test method and apparatus therefor |
| JP2009508127A (en) * | 2005-09-13 | 2009-02-26 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Leak detector |
-
1979
- 1979-12-21 JP JP16715579A patent/JPS5689040A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61165443U (en) * | 1985-04-03 | 1986-10-14 | ||
| JPH0249553Y2 (en) * | 1985-04-03 | 1990-12-27 | ||
| JPS62144039A (en) * | 1985-12-18 | 1987-06-27 | Ulvac Corp | Helium leak test method and apparatus therefor |
| JPH081405B2 (en) * | 1985-12-18 | 1996-01-10 | 日本真空技術株式会社 | Helium leak test equipment |
| JP2009508127A (en) * | 2005-09-13 | 2009-02-26 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Leak detector |
| JP4714271B2 (en) * | 2005-09-13 | 2011-06-29 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Leak detector |
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