JPS55135768A - Test piece for charged particle beam shape detection - Google Patents

Test piece for charged particle beam shape detection

Info

Publication number
JPS55135768A
JPS55135768A JP4350879A JP4350879A JPS55135768A JP S55135768 A JPS55135768 A JP S55135768A JP 4350879 A JP4350879 A JP 4350879A JP 4350879 A JP4350879 A JP 4350879A JP S55135768 A JPS55135768 A JP S55135768A
Authority
JP
Japan
Prior art keywords
electron beam
particle beam
incident
test piece
beam shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4350879A
Other languages
Japanese (ja)
Other versions
JPS6111385B2 (en
Inventor
Shigetomo Yamazaki
Koji Ueda
Hiromoto Kawamoto
Masahiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP4350879A priority Critical patent/JPS55135768A/en
Publication of JPS55135768A publication Critical patent/JPS55135768A/en
Publication of JPS6111385B2 publication Critical patent/JPS6111385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To increase the S/N and to enable to detect the detection of beam shape with high accuracy, without reflection from ground piece, by forming the ground piece into thin film through which beam can easily be transmitted.
CONSTITUTION: The electron beam 1 as incident charge electron particle beam is incident toward the electron beam detection sample S. The sample S has the construction that the substance having greater reflection of electron beam 1 is placed on the ground piece 3 made of the substance having almost no reflection of the incident electron beam 1. Accordingly, the electron beam 1 incident is transmitted without being reflected on the ground piece 3, then no background is caused.
COPYRIGHT: (C)1980,JPO&Japio
JP4350879A 1979-04-10 1979-04-10 Test piece for charged particle beam shape detection Granted JPS55135768A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4350879A JPS55135768A (en) 1979-04-10 1979-04-10 Test piece for charged particle beam shape detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4350879A JPS55135768A (en) 1979-04-10 1979-04-10 Test piece for charged particle beam shape detection

Publications (2)

Publication Number Publication Date
JPS55135768A true JPS55135768A (en) 1980-10-22
JPS6111385B2 JPS6111385B2 (en) 1986-04-02

Family

ID=12665666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4350879A Granted JPS55135768A (en) 1979-04-10 1979-04-10 Test piece for charged particle beam shape detection

Country Status (1)

Country Link
JP (1) JPS55135768A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613654U (en) * 1992-07-31 1994-02-22 積水化成品工業株式会社 Clothes hanger mount

Also Published As

Publication number Publication date
JPS6111385B2 (en) 1986-04-02

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