JPS55135768A - Test piece for charged particle beam shape detection - Google Patents
Test piece for charged particle beam shape detectionInfo
- Publication number
- JPS55135768A JPS55135768A JP4350879A JP4350879A JPS55135768A JP S55135768 A JPS55135768 A JP S55135768A JP 4350879 A JP4350879 A JP 4350879A JP 4350879 A JP4350879 A JP 4350879A JP S55135768 A JPS55135768 A JP S55135768A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- particle beam
- incident
- test piece
- beam shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To increase the S/N and to enable to detect the detection of beam shape with high accuracy, without reflection from ground piece, by forming the ground piece into thin film through which beam can easily be transmitted.
CONSTITUTION: The electron beam 1 as incident charge electron particle beam is incident toward the electron beam detection sample S. The sample S has the construction that the substance having greater reflection of electron beam 1 is placed on the ground piece 3 made of the substance having almost no reflection of the incident electron beam 1. Accordingly, the electron beam 1 incident is transmitted without being reflected on the ground piece 3, then no background is caused.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4350879A JPS55135768A (en) | 1979-04-10 | 1979-04-10 | Test piece for charged particle beam shape detection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4350879A JPS55135768A (en) | 1979-04-10 | 1979-04-10 | Test piece for charged particle beam shape detection |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55135768A true JPS55135768A (en) | 1980-10-22 |
JPS6111385B2 JPS6111385B2 (en) | 1986-04-02 |
Family
ID=12665666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4350879A Granted JPS55135768A (en) | 1979-04-10 | 1979-04-10 | Test piece for charged particle beam shape detection |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55135768A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0613654U (en) * | 1992-07-31 | 1994-02-22 | 積水化成品工業株式会社 | Clothes hanger mount |
-
1979
- 1979-04-10 JP JP4350879A patent/JPS55135768A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6111385B2 (en) | 1986-04-02 |
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