JPS52123163A - Reflection electron image observation unit for scanning type electroni c microscope - Google Patents

Reflection electron image observation unit for scanning type electroni c microscope

Info

Publication number
JPS52123163A
JPS52123163A JP3920176A JP3920176A JPS52123163A JP S52123163 A JPS52123163 A JP S52123163A JP 3920176 A JP3920176 A JP 3920176A JP 3920176 A JP3920176 A JP 3920176A JP S52123163 A JPS52123163 A JP S52123163A
Authority
JP
Japan
Prior art keywords
electroni
microscope
reflection electron
observation unit
scanning type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3920176A
Other languages
Japanese (ja)
Inventor
Naotake Saito
Akimitsu Okura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3920176A priority Critical patent/JPS52123163A/en
Publication of JPS52123163A publication Critical patent/JPS52123163A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To secure automatic cutoff of bias voltage even in case the test sample may touch the metal mesh, and thus to ensure safe observation of the reflection electron eliminating the danger caused by the touch of the sample and metal mesh.
COPYRIGHT: (C)1977,JPO&Japio
JP3920176A 1976-04-09 1976-04-09 Reflection electron image observation unit for scanning type electroni c microscope Pending JPS52123163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3920176A JPS52123163A (en) 1976-04-09 1976-04-09 Reflection electron image observation unit for scanning type electroni c microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3920176A JPS52123163A (en) 1976-04-09 1976-04-09 Reflection electron image observation unit for scanning type electroni c microscope

Publications (1)

Publication Number Publication Date
JPS52123163A true JPS52123163A (en) 1977-10-17

Family

ID=12546502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3920176A Pending JPS52123163A (en) 1976-04-09 1976-04-09 Reflection electron image observation unit for scanning type electroni c microscope

Country Status (1)

Country Link
JP (1) JPS52123163A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211757A (en) * 1984-04-05 1985-10-24 Hitachi Ltd Ion microbeam processing device
EP0594084B1 (en) * 1992-10-20 2003-05-21 Hitachi, Ltd. Scanning electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211757A (en) * 1984-04-05 1985-10-24 Hitachi Ltd Ion microbeam processing device
EP0594084B1 (en) * 1992-10-20 2003-05-21 Hitachi, Ltd. Scanning electron microscope

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