JPS5210667A - Transmission type electronic microscope processing x-ray analysis func tion - Google Patents

Transmission type electronic microscope processing x-ray analysis func tion

Info

Publication number
JPS5210667A
JPS5210667A JP8617175A JP8617175A JPS5210667A JP S5210667 A JPS5210667 A JP S5210667A JP 8617175 A JP8617175 A JP 8617175A JP 8617175 A JP8617175 A JP 8617175A JP S5210667 A JPS5210667 A JP S5210667A
Authority
JP
Japan
Prior art keywords
transmission type
type electronic
ray analysis
electronic microscope
func tion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8617175A
Other languages
Japanese (ja)
Inventor
Shigeto Sunakozawa
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8617175A priority Critical patent/JPS5210667A/en
Publication of JPS5210667A publication Critical patent/JPS5210667A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate the selection of the minute particular part of the testing material by switching the size of the electronize beam spot by observation mode and X-ray analyzing mode.
COPYRIGHT: (C)1977,JPO&Japio
JP8617175A 1975-07-16 1975-07-16 Transmission type electronic microscope processing x-ray analysis func tion Pending JPS5210667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8617175A JPS5210667A (en) 1975-07-16 1975-07-16 Transmission type electronic microscope processing x-ray analysis func tion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8617175A JPS5210667A (en) 1975-07-16 1975-07-16 Transmission type electronic microscope processing x-ray analysis func tion

Publications (1)

Publication Number Publication Date
JPS5210667A true JPS5210667A (en) 1977-01-27

Family

ID=13879298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8617175A Pending JPS5210667A (en) 1975-07-16 1975-07-16 Transmission type electronic microscope processing x-ray analysis func tion

Country Status (1)

Country Link
JP (1) JPS5210667A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019124492A (en) * 2018-01-12 2019-07-25 株式会社日立製作所 electronic microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019124492A (en) * 2018-01-12 2019-07-25 株式会社日立製作所 electronic microscope

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