JPS5226153A - Sample electrification protection device in electron microscopes - Google Patents
Sample electrification protection device in electron microscopesInfo
- Publication number
- JPS5226153A JPS5226153A JP10186575A JP10186575A JPS5226153A JP S5226153 A JPS5226153 A JP S5226153A JP 10186575 A JP10186575 A JP 10186575A JP 10186575 A JP10186575 A JP 10186575A JP S5226153 A JPS5226153 A JP S5226153A
- Authority
- JP
- Japan
- Prior art keywords
- protection device
- sample
- electron microscopes
- electrification protection
- sample electrification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: By collecting a secondary electron discharged from the surface of a diaphragm due to the electron transmitted from a sample with the electrode set up between a diaphragm and a sample, the electrification of the sample shall be prevented.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10186575A JPS5226153A (en) | 1975-08-22 | 1975-08-22 | Sample electrification protection device in electron microscopes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10186575A JPS5226153A (en) | 1975-08-22 | 1975-08-22 | Sample electrification protection device in electron microscopes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226153A true JPS5226153A (en) | 1977-02-26 |
JPS576663B2 JPS576663B2 (en) | 1982-02-05 |
Family
ID=14311880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10186575A Granted JPS5226153A (en) | 1975-08-22 | 1975-08-22 | Sample electrification protection device in electron microscopes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226153A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009193833A (en) * | 2008-02-15 | 2009-08-27 | Hitachi Ltd | Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method |
-
1975
- 1975-08-22 JP JP10186575A patent/JPS5226153A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009193833A (en) * | 2008-02-15 | 2009-08-27 | Hitachi Ltd | Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method |
Also Published As
Publication number | Publication date |
---|---|
JPS576663B2 (en) | 1982-02-05 |
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