JPS5226153A - Sample electrification protection device in electron microscopes - Google Patents

Sample electrification protection device in electron microscopes

Info

Publication number
JPS5226153A
JPS5226153A JP10186575A JP10186575A JPS5226153A JP S5226153 A JPS5226153 A JP S5226153A JP 10186575 A JP10186575 A JP 10186575A JP 10186575 A JP10186575 A JP 10186575A JP S5226153 A JPS5226153 A JP S5226153A
Authority
JP
Japan
Prior art keywords
protection device
sample
electron microscopes
electrification protection
sample electrification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10186575A
Other languages
Japanese (ja)
Other versions
JPS576663B2 (en
Inventor
Katsuhide Mizukami
Kouhei Shirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP10186575A priority Critical patent/JPS5226153A/en
Publication of JPS5226153A publication Critical patent/JPS5226153A/en
Publication of JPS576663B2 publication Critical patent/JPS576663B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: By collecting a secondary electron discharged from the surface of a diaphragm due to the electron transmitted from a sample with the electrode set up between a diaphragm and a sample, the electrification of the sample shall be prevented.
COPYRIGHT: (C)1977,JPO&Japio
JP10186575A 1975-08-22 1975-08-22 Sample electrification protection device in electron microscopes Granted JPS5226153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10186575A JPS5226153A (en) 1975-08-22 1975-08-22 Sample electrification protection device in electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10186575A JPS5226153A (en) 1975-08-22 1975-08-22 Sample electrification protection device in electron microscopes

Publications (2)

Publication Number Publication Date
JPS5226153A true JPS5226153A (en) 1977-02-26
JPS576663B2 JPS576663B2 (en) 1982-02-05

Family

ID=14311880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10186575A Granted JPS5226153A (en) 1975-08-22 1975-08-22 Sample electrification protection device in electron microscopes

Country Status (1)

Country Link
JP (1) JPS5226153A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009193833A (en) * 2008-02-15 2009-08-27 Hitachi Ltd Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009193833A (en) * 2008-02-15 2009-08-27 Hitachi Ltd Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method

Also Published As

Publication number Publication date
JPS576663B2 (en) 1982-02-05

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