JPS576663B2 - - Google Patents
Info
- Publication number
- JPS576663B2 JPS576663B2 JP10186575A JP10186575A JPS576663B2 JP S576663 B2 JPS576663 B2 JP S576663B2 JP 10186575 A JP10186575 A JP 10186575A JP 10186575 A JP10186575 A JP 10186575A JP S576663 B2 JPS576663 B2 JP S576663B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10186575A JPS5226153A (en) | 1975-08-22 | 1975-08-22 | Sample electrification protection device in electron microscopes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10186575A JPS5226153A (en) | 1975-08-22 | 1975-08-22 | Sample electrification protection device in electron microscopes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226153A JPS5226153A (en) | 1977-02-26 |
JPS576663B2 true JPS576663B2 (en) | 1982-02-05 |
Family
ID=14311880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10186575A Granted JPS5226153A (en) | 1975-08-22 | 1975-08-22 | Sample electrification protection device in electron microscopes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226153A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5449679B2 (en) * | 2008-02-15 | 2014-03-19 | 株式会社日立製作所 | Electron beam observation apparatus and sample observation method |
-
1975
- 1975-08-22 JP JP10186575A patent/JPS5226153A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5226153A (en) | 1977-02-26 |