JPS5267353A - Electrostatic chuck - Google Patents

Electrostatic chuck

Info

Publication number
JPS5267353A
JPS5267353A JP14224775A JP14224775A JPS5267353A JP S5267353 A JPS5267353 A JP S5267353A JP 14224775 A JP14224775 A JP 14224775A JP 14224775 A JP14224775 A JP 14224775A JP S5267353 A JPS5267353 A JP S5267353A
Authority
JP
Japan
Prior art keywords
electrostatic chuck
specimen
tdvantage
intensively
retain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14224775A
Other languages
Japanese (ja)
Inventor
Shojiro Asai
Masaru Miyazaki
Osamu Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14224775A priority Critical patent/JPS5267353A/en
Publication of JPS5267353A publication Critical patent/JPS5267353A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To intensively retain a specimen even in vacuum taking tdvantage of electrostatic attraction by applying a potential difference between the specimen carrier and the specimen placed thereon through a thin insulating material.
COPYRIGHT: (C)1977,JPO&Japio
JP14224775A 1975-12-01 1975-12-01 Electrostatic chuck Pending JPS5267353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14224775A JPS5267353A (en) 1975-12-01 1975-12-01 Electrostatic chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14224775A JPS5267353A (en) 1975-12-01 1975-12-01 Electrostatic chuck

Publications (1)

Publication Number Publication Date
JPS5267353A true JPS5267353A (en) 1977-06-03

Family

ID=15310856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14224775A Pending JPS5267353A (en) 1975-12-01 1975-12-01 Electrostatic chuck

Country Status (1)

Country Link
JP (1) JPS5267353A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857736A (en) * 1981-09-14 1983-04-06 Philips Nv Static chuck
JPS59139641A (en) * 1983-01-31 1984-08-10 Fujitsu Ltd Electrostatic sucker
JPS60190852A (en) * 1985-02-22 1985-09-28 Hitachi Ltd Specimen holding apparatus of ultrasonic microscope
JPS62157752A (en) * 1985-12-29 1987-07-13 Kyocera Corp Electrostatic chuck
JPS6395644A (en) * 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> Electrostatic chuck
US5591269A (en) * 1993-06-24 1997-01-07 Tokyo Electron Limited Vacuum processing apparatus
US6092299A (en) * 1997-09-05 2000-07-25 Tokyo Electron Limited Vacuum processing apparatus
US6207006B1 (en) 1997-09-18 2001-03-27 Tokyo Electron Limited Vacuum processing apparatus
US6917021B2 (en) 2002-06-20 2005-07-12 Shin-Etsu Chemical Co., Ltd. Heating apparatus with electrostatic attraction function
US6949726B2 (en) 2003-08-27 2005-09-27 Shin-Etsu Chemical Co., Ltd. Heating apparatus having electrostatic adsorption function
US6953918B2 (en) 2002-11-01 2005-10-11 Shin-Etsu Chemical Co., Ltd. Heating apparatus which has electrostatic adsorption function, and method for producing it
EP1689211A2 (en) 2005-02-04 2006-08-09 Shin-Etsu Chemical Co., Ltd. Method for restoring ceramic heater
US7679880B2 (en) 2006-04-28 2010-03-16 Shin-Etsu Chemical Co., Ltd Electrostatic chuck and manufacturing method thereof

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857736A (en) * 1981-09-14 1983-04-06 Philips Nv Static chuck
JPS6331937B2 (en) * 1981-09-14 1988-06-27 Fuiritsupusu Furuuiranpenfuaburiken Nv
JPS59139641A (en) * 1983-01-31 1984-08-10 Fujitsu Ltd Electrostatic sucker
JPS6245697B2 (en) * 1983-01-31 1987-09-28 Fujitsu Ltd
JPS60190852A (en) * 1985-02-22 1985-09-28 Hitachi Ltd Specimen holding apparatus of ultrasonic microscope
JPH0236904B2 (en) * 1985-02-22 1990-08-21 Hitachi Ltd
JPS62157752A (en) * 1985-12-29 1987-07-13 Kyocera Corp Electrostatic chuck
JPS6395644A (en) * 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> Electrostatic chuck
US5591269A (en) * 1993-06-24 1997-01-07 Tokyo Electron Limited Vacuum processing apparatus
US6092299A (en) * 1997-09-05 2000-07-25 Tokyo Electron Limited Vacuum processing apparatus
US6207006B1 (en) 1997-09-18 2001-03-27 Tokyo Electron Limited Vacuum processing apparatus
US6917021B2 (en) 2002-06-20 2005-07-12 Shin-Etsu Chemical Co., Ltd. Heating apparatus with electrostatic attraction function
US6953918B2 (en) 2002-11-01 2005-10-11 Shin-Etsu Chemical Co., Ltd. Heating apparatus which has electrostatic adsorption function, and method for producing it
US6949726B2 (en) 2003-08-27 2005-09-27 Shin-Etsu Chemical Co., Ltd. Heating apparatus having electrostatic adsorption function
EP1689211A2 (en) 2005-02-04 2006-08-09 Shin-Etsu Chemical Co., Ltd. Method for restoring ceramic heater
US7679880B2 (en) 2006-04-28 2010-03-16 Shin-Etsu Chemical Co., Ltd Electrostatic chuck and manufacturing method thereof

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