JPS52146559A - Electrode forming method - Google Patents

Electrode forming method

Info

Publication number
JPS52146559A
JPS52146559A JP6372976A JP6372976A JPS52146559A JP S52146559 A JPS52146559 A JP S52146559A JP 6372976 A JP6372976 A JP 6372976A JP 6372976 A JP6372976 A JP 6372976A JP S52146559 A JPS52146559 A JP S52146559A
Authority
JP
Japan
Prior art keywords
forming method
substances
electrode forming
wafers
electrode substances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6372976A
Other languages
Japanese (ja)
Other versions
JPS5516533B2 (en
Inventor
Yoshio Toyoshima
Ganzo Iwane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6372976A priority Critical patent/JPS52146559A/en
Publication of JPS52146559A publication Critical patent/JPS52146559A/en
Publication of JPS5516533B2 publication Critical patent/JPS5516533B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To obtain metal electrodes of good ohmic characteristics by vacuum evaporating electrode substances on semiconductor wafers within a vacuum evaporation unit, alloying the substances through the use of a halogen lamp wi with a light collecting reflecting plate, and forming plural electrode substances on the wafers through the repetition of these.
COPYRIGHT: (C)1977,JPO&Japio
JP6372976A 1976-05-31 1976-05-31 Electrode forming method Granted JPS52146559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6372976A JPS52146559A (en) 1976-05-31 1976-05-31 Electrode forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6372976A JPS52146559A (en) 1976-05-31 1976-05-31 Electrode forming method

Publications (2)

Publication Number Publication Date
JPS52146559A true JPS52146559A (en) 1977-12-06
JPS5516533B2 JPS5516533B2 (en) 1980-05-02

Family

ID=13237771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6372976A Granted JPS52146559A (en) 1976-05-31 1976-05-31 Electrode forming method

Country Status (1)

Country Link
JP (1) JPS52146559A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5561024A (en) * 1978-10-31 1980-05-08 Bbc Brown Boveri & Cie Method of manufacturing electric contact of semiconductor element
JPS5563819A (en) * 1978-11-06 1980-05-14 Nec Corp Manufacture of semiconductor device
JPS566434A (en) * 1979-06-28 1981-01-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS57124430A (en) * 1981-01-23 1982-08-03 Sony Corp Manufacture of semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829184A (en) * 1971-08-17 1973-04-18
JPS5119477A (en) * 1974-08-08 1976-02-16 Mitsubishi Electric Corp Handotaisochino denkyokukeiseihoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829184A (en) * 1971-08-17 1973-04-18
JPS5119477A (en) * 1974-08-08 1976-02-16 Mitsubishi Electric Corp Handotaisochino denkyokukeiseihoho

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5561024A (en) * 1978-10-31 1980-05-08 Bbc Brown Boveri & Cie Method of manufacturing electric contact of semiconductor element
JPS5563819A (en) * 1978-11-06 1980-05-14 Nec Corp Manufacture of semiconductor device
JPS566434A (en) * 1979-06-28 1981-01-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS57124430A (en) * 1981-01-23 1982-08-03 Sony Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5516533B2 (en) 1980-05-02

Similar Documents

Publication Publication Date Title
JPS52146559A (en) Electrode forming method
JPS53145562A (en) Electronic gun
JPS5310260A (en) Brown tube
JPS5442975A (en) Forming method of semiconductor electrode
JPS52115161A (en) Electron gun for electron beam exposing device
JPS547891A (en) Manufacture for planar semiconductor light emission device
JPS53140967A (en) Production of electrodes of semiconductor device
JPS5313869A (en) Cathode ray tube
JPS5429561A (en) Semiconductor device
JPS5441097A (en) Solid display device
JPS5296867A (en) Semiconductor unit and its manufacture
JPS5419375A (en) Semiconductor device
JPS5367392A (en) Semiconductor light emitting device
JPS548916A (en) Pick up tube
JPS545212A (en) Bottom structure of cylindrical tank of flat bottom
JPS53110490A (en) Gallim phosphide light emitting element
JPS53127290A (en) Manufacture for photo conductive film
JPS5434172A (en) Electromagnetic-shielding dust-proof constant-temperature chamber
JPS53140873A (en) Method of coating electrode coil for bulb with cathod material
JPS51116679A (en) Diode
JPS52156591A (en) Production of x-ray tube condensing electrode
JPS53123075A (en) Group iii-v compound semiconductor device
JPS52124861A (en) Semiconductor element
JPS52122080A (en) Forming methods of ohmic electrodes
JPS52144272A (en) Forming method of electrode in semiconductor device