JPS6425468A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6425468A JPS6425468A JP62182743A JP18274387A JPS6425468A JP S6425468 A JPS6425468 A JP S6425468A JP 62182743 A JP62182743 A JP 62182743A JP 18274387 A JP18274387 A JP 18274387A JP S6425468 A JPS6425468 A JP S6425468A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- region
- layer
- contact
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052710 silicon Inorganic materials 0.000 abstract 4
- 239000010703 silicon Substances 0.000 abstract 4
- 239000004020 conductor Substances 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 230000002457 bidirectional effect Effects 0.000 abstract 1
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To simplify the design of wirings by bringing a polycrystalline silicon layer into contact with a thin silicon film through a fine region, and performing bidirectional conduction through a conductor layer. CONSTITUTION:An N-type region 1 on a single crystalline silicon substrate 115 is connected through the opening 11 of a silicon oxide film 10 to an N-type polycrystalline silicon 5. Then, a thin P-type silicon film 3 is brought into contact with the upper face of the silicon 5. In this case, a conductor layer 9 is provided directly on a contact region to conduct in bidirections. Thus, the contact region of the silicon 5 with the film 3 may be extremely small, and the region of the layer 9 may be minimum in manufacturing process. Further, since the layer 9 can provide sufficient effect even with a reduced thickness, it is easy to form an insulating layer 12 on the top, and other wirings may be provided freely on the top of the region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182743A JPH0750746B2 (en) | 1987-07-21 | 1987-07-21 | Memory cell for complementary MOS static RAM |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182743A JPH0750746B2 (en) | 1987-07-21 | 1987-07-21 | Memory cell for complementary MOS static RAM |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6425468A true JPS6425468A (en) | 1989-01-27 |
JPH0750746B2 JPH0750746B2 (en) | 1995-05-31 |
Family
ID=16123659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62182743A Expired - Lifetime JPH0750746B2 (en) | 1987-07-21 | 1987-07-21 | Memory cell for complementary MOS static RAM |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0750746B2 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57117257A (en) * | 1981-01-13 | 1982-07-21 | Nec Corp | Semiconductor device |
JPS58206139A (en) * | 1982-05-26 | 1983-12-01 | Nec Corp | Semiconductor integrated circuit |
JPS5935450A (en) * | 1982-08-23 | 1984-02-27 | Nec Corp | Semiconductor device |
JPS6031242A (en) * | 1983-07-30 | 1985-02-18 | Mitsubishi Electric Corp | Semiconductor device |
JPS61271826A (en) * | 1985-05-27 | 1986-12-02 | Nec Corp | Manufacture of semiconductor device |
-
1987
- 1987-07-21 JP JP62182743A patent/JPH0750746B2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57117257A (en) * | 1981-01-13 | 1982-07-21 | Nec Corp | Semiconductor device |
JPS58206139A (en) * | 1982-05-26 | 1983-12-01 | Nec Corp | Semiconductor integrated circuit |
JPS5935450A (en) * | 1982-08-23 | 1984-02-27 | Nec Corp | Semiconductor device |
JPS6031242A (en) * | 1983-07-30 | 1985-02-18 | Mitsubishi Electric Corp | Semiconductor device |
JPS61271826A (en) * | 1985-05-27 | 1986-12-02 | Nec Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPH0750746B2 (en) | 1995-05-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5669844A (en) | Manufacture of semiconductor device | |
JPS6425468A (en) | Semiconductor device | |
JPS5691470A (en) | Semiconductor | |
JPS5732641A (en) | Semiconductor device | |
JPS6437535A (en) | Thin film semiconductor element | |
JPS5544743A (en) | Manufacture of semiconductor device | |
JPS572519A (en) | Manufacture of semiconductor device | |
JPS5772344A (en) | Manufacture of semiconductor device | |
JPS5493366A (en) | Bipolar type transistor | |
JPS52124860A (en) | Electrode formation method for semiconductor devices | |
JPS5522878A (en) | Insulation gate type field effect semiconductor device | |
JPS6468959A (en) | Semiconductor device | |
JPS6428866A (en) | Semiconductor device | |
JPS55157240A (en) | Semiconductor device | |
JPS57111043A (en) | Semiconductor integrated circuit and manufacture thereof | |
JPS52117079A (en) | Preparation of semiconductor device | |
JPS6482566A (en) | Field-effect semiconductor device | |
JPS56142672A (en) | Semiconductor device and manufacture thereof | |
JPS57197833A (en) | Semiconductor device | |
JPS57160156A (en) | Semiconductor device | |
JPS57114268A (en) | Semiconductor device | |
JPS5484980A (en) | Semiconductor device | |
JPS551179A (en) | Complementary mis integrated circuit apparatus | |
JPS6415964A (en) | Manufacture of semiconductor integrated circuit device | |
JPS57210659A (en) | Semiconductor device |