JPS6424460A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6424460A
JPS6424460A JP18192387A JP18192387A JPS6424460A JP S6424460 A JPS6424460 A JP S6424460A JP 18192387 A JP18192387 A JP 18192387A JP 18192387 A JP18192387 A JP 18192387A JP S6424460 A JPS6424460 A JP S6424460A
Authority
JP
Japan
Prior art keywords
film
insulating film
gate electrode
source
drain regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18192387A
Other languages
English (en)
Inventor
Ichiro Kato
Hiroshi Horie
Jiro Matsuo
Noriaki Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18192387A priority Critical patent/JPS6424460A/ja
Publication of JPS6424460A publication Critical patent/JPS6424460A/ja
Pending legal-status Critical Current

Links

JP18192387A 1987-07-20 1987-07-20 Manufacture of semiconductor device Pending JPS6424460A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18192387A JPS6424460A (en) 1987-07-20 1987-07-20 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18192387A JPS6424460A (en) 1987-07-20 1987-07-20 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6424460A true JPS6424460A (en) 1989-01-26

Family

ID=16109268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18192387A Pending JPS6424460A (en) 1987-07-20 1987-07-20 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6424460A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6489632B1 (en) 1993-01-18 2002-12-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having a gate oxide film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6489632B1 (en) 1993-01-18 2002-12-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having a gate oxide film
US6995432B2 (en) 1993-01-18 2006-02-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having a gate oxide film with some NTFTS with LDD regions and no PTFTS with LDD regions

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