JPS6418757U - - Google Patents
Info
- Publication number
- JPS6418757U JPS6418757U JP11427787U JP11427787U JPS6418757U JP S6418757 U JPS6418757 U JP S6418757U JP 11427787 U JP11427787 U JP 11427787U JP 11427787 U JP11427787 U JP 11427787U JP S6418757 U JPS6418757 U JP S6418757U
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- insulating film
- film
- substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 150000003377 silicon compounds Chemical class 0.000 claims 3
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427787U JPS6418757U (en, 2012) | 1987-07-25 | 1987-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427787U JPS6418757U (en, 2012) | 1987-07-25 | 1987-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418757U true JPS6418757U (en, 2012) | 1989-01-30 |
Family
ID=31354874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11427787U Pending JPS6418757U (en, 2012) | 1987-07-25 | 1987-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418757U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529347A (ja) * | 1990-10-12 | 1993-02-05 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| US8064003B2 (en) | 2003-11-28 | 2011-11-22 | Tadahiro Ohmi | Thin film transistor integrated circuit device, active matrix display device, and manufacturing methods of the same |
-
1987
- 1987-07-25 JP JP11427787U patent/JPS6418757U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529347A (ja) * | 1990-10-12 | 1993-02-05 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| US8064003B2 (en) | 2003-11-28 | 2011-11-22 | Tadahiro Ohmi | Thin film transistor integrated circuit device, active matrix display device, and manufacturing methods of the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE35067T1 (de) | Kleinflaechiger duennfilmtransistor. | |
| GB2016803A (en) | Thin film transistor construction and manufacturing method of the same | |
| JPS6418757U (en, 2012) | ||
| JPH03101556U (en, 2012) | ||
| JPH0612780B2 (ja) | 薄膜トランジスタアレイの製造法 | |
| JPS6418756U (en, 2012) | ||
| JPS6418761U (en, 2012) | ||
| JPS6418758U (en, 2012) | ||
| JPS577972A (en) | Insulated gate type thin film transistor | |
| JPS59103457U (ja) | 薄膜半導体装置用ガラス基板 | |
| JP2568854B2 (ja) | 薄膜トランジスタ及びその製造方法 | |
| JPS6018558U (ja) | 薄膜トランジスタ素子 | |
| JPS61166528U (en, 2012) | ||
| JP2928953B2 (ja) | 薄膜装置 | |
| JPH0262419U (en, 2012) | ||
| JPH02118954U (en, 2012) | ||
| JPS6066051U (ja) | 薄膜トランジスタ | |
| JPS6420754U (en, 2012) | ||
| JPH0316328U (en, 2012) | ||
| JPS61109151U (en, 2012) | ||
| JPS5926265U (ja) | 半導体装置 | |
| JPS62186445U (en, 2012) | ||
| KR930009082A (ko) | 트랜치형 dram셀 제조방법 | |
| JPS61119364U (en, 2012) | ||
| JPS59172773A (ja) | 薄膜トランジスタ素子およびその製造方法 |