JPS63946B2 - - Google Patents
Info
- Publication number
- JPS63946B2 JPS63946B2 JP54055028A JP5502879A JPS63946B2 JP S63946 B2 JPS63946 B2 JP S63946B2 JP 54055028 A JP54055028 A JP 54055028A JP 5502879 A JP5502879 A JP 5502879A JP S63946 B2 JPS63946 B2 JP S63946B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- film
- pattern
- mask
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5502879A JPS55146933A (en) | 1979-05-04 | 1979-05-04 | Manufacturing of integrated element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5502879A JPS55146933A (en) | 1979-05-04 | 1979-05-04 | Manufacturing of integrated element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55146933A JPS55146933A (en) | 1980-11-15 |
JPS63946B2 true JPS63946B2 (enrdf_load_html_response) | 1988-01-09 |
Family
ID=12987205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5502879A Granted JPS55146933A (en) | 1979-05-04 | 1979-05-04 | Manufacturing of integrated element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55146933A (enrdf_load_html_response) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5224084A (en) * | 1975-08-19 | 1977-02-23 | Matsushita Electric Ind Co Ltd | Semiconductor manufacturing rpocess |
JPS6053460B2 (ja) * | 1976-07-23 | 1985-11-26 | 日本電気株式会社 | 微細パタン加工法 |
-
1979
- 1979-05-04 JP JP5502879A patent/JPS55146933A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS55146933A (en) | 1980-11-15 |
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