JPS638527B2 - - Google Patents
Info
- Publication number
- JPS638527B2 JPS638527B2 JP54141419A JP14141979A JPS638527B2 JP S638527 B2 JPS638527 B2 JP S638527B2 JP 54141419 A JP54141419 A JP 54141419A JP 14141979 A JP14141979 A JP 14141979A JP S638527 B2 JPS638527 B2 JP S638527B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- read
- transducer
- thin film
- write
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 22
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 41
- 229910000889 permalloy Inorganic materials 0.000 description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 239000012212 insulator Substances 0.000 description 9
- 238000000151 deposition Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 230000001939 inductive effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000002659 electrodeposit Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/972,101 US4219853A (en) | 1978-12-21 | 1978-12-21 | Read/write thin film head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5584018A JPS5584018A (en) | 1980-06-24 |
JPS638527B2 true JPS638527B2 (US06566495-20030520-M00011.png) | 1988-02-23 |
Family
ID=25519161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14141979A Granted JPS5584018A (en) | 1978-12-21 | 1979-11-02 | Thinnfilm head |
Country Status (4)
Country | Link |
---|---|
US (1) | US4219853A (US06566495-20030520-M00011.png) |
EP (1) | EP0013363B1 (US06566495-20030520-M00011.png) |
JP (1) | JPS5584018A (US06566495-20030520-M00011.png) |
DE (1) | DE2960790D1 (US06566495-20030520-M00011.png) |
Families Citing this family (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4298899A (en) * | 1979-12-17 | 1981-11-03 | International Business Machines Corporation | Magnetic head assembly with ferrite core |
US4458346A (en) * | 1980-11-17 | 1984-07-03 | Matsushita Electric Industrial Co., Ltd. | Pickup stylus |
US4439793A (en) * | 1981-10-22 | 1984-03-27 | Fuji Photo Film Co., Ltd. | Thin film head array |
JPS58137120A (ja) * | 1982-02-05 | 1983-08-15 | Hitachi Ltd | 薄膜磁気ヘツド |
US4541026A (en) * | 1982-07-20 | 1985-09-10 | Vertimag Systems Corporation | Hybrid read-write head for perpendicular recording media |
US4581663A (en) * | 1982-11-02 | 1986-04-08 | Nec Corporation | Buried servo recording system having dual transducers |
EP0108355B1 (en) | 1982-11-04 | 1988-01-20 | Kao Corporation | Magnetic head |
JPS5998316A (ja) * | 1982-11-26 | 1984-06-06 | Sharp Corp | 薄膜磁気ヘツドの製造方法 |
FR2559297B1 (fr) * | 1984-02-03 | 1990-01-12 | Commissariat Energie Atomique | Nouveau patin de vol pour tetes magnetiques d'enregistrement |
US4631613A (en) * | 1984-04-16 | 1986-12-23 | Eastman Kodak Company | Thin film head having improved saturation magnetization |
JPS61120318A (ja) * | 1984-11-15 | 1986-06-07 | Matsushita Electric Ind Co Ltd | 一体化薄膜磁気ヘツド |
JPS61140419U (US06566495-20030520-M00011.png) * | 1985-02-05 | 1986-08-30 | ||
JPS61210511A (ja) * | 1985-03-15 | 1986-09-18 | Tdk Corp | 可撓性媒体用薄膜磁気ヘツド及びそれを用いた磁気記憶装置 |
JPS62192016A (ja) * | 1986-02-19 | 1987-08-22 | Alps Electric Co Ltd | 垂直磁気記録用磁気ヘツドおよびその製造方法 |
JPS62262210A (ja) * | 1986-05-08 | 1987-11-14 | Alps Electric Co Ltd | 薄膜磁気ヘツドの製造方法 |
US4789914A (en) * | 1986-10-28 | 1988-12-06 | International Business Machines Corporation | Thin film magnetic read-write head/arm assemblies |
FR2609201B1 (fr) * | 1986-12-30 | 1989-10-27 | Bull Sa | Tete d'ecriture magnetique et de lecture optique d'un support d'informations |
US5165981A (en) * | 1987-03-20 | 1992-11-24 | Sumitomo Electric Industries, Ltd. | Ceramic substrate and preparation of the same |
JPS63234405A (ja) * | 1987-03-20 | 1988-09-29 | Sumitomo Electric Ind Ltd | セラミツク基板及びその製造方法 |
US4856181A (en) * | 1987-09-24 | 1989-08-15 | Simens Aktiengesellschaft | Method for manufacturing terminal contacts for thin-film magnetic heads |
US4975795A (en) * | 1987-12-04 | 1990-12-04 | Digital Equipment Corporation | Electrical connection for a self-loading head assembly for disk drives |
JPH0731362Y2 (ja) * | 1988-06-03 | 1995-07-19 | アルプス電気株式会社 | 薄膜磁気ヘッドおよび浮動式磁気ヘッド |
JPH0281307A (ja) * | 1988-09-19 | 1990-03-22 | Mitsubishi Electric Corp | 磁気ヘッド |
EP0387364A1 (de) * | 1989-03-13 | 1990-09-19 | Siemens Aktiengesellschaft | Dünnfilm-Magnetkopfeinheit |
JP2637823B2 (ja) * | 1989-06-08 | 1997-08-06 | ティーディーケイ株式会社 | 磁気ヘッド |
JP2815176B2 (ja) * | 1989-06-08 | 1998-10-27 | ティーディーケイ株式会社 | スライダ,ヘッド及び記録再生装置 |
US5016342A (en) * | 1989-06-30 | 1991-05-21 | Ampex Corporation | Method of manufacturing ultra small track width thin film transducers |
US5220471A (en) * | 1990-08-14 | 1993-06-15 | Tdk Corporation | Air bearing slider having a longitudinal groove in surface remote from recording medium |
US5059278A (en) * | 1990-09-28 | 1991-10-22 | Seagate Technology | Selective chemical removal of coil seed-layer in thin film head magnetic transducer |
JPH04366411A (ja) * | 1991-06-13 | 1992-12-18 | Ngk Insulators Ltd | 薄膜磁気ヘッド |
US5267392A (en) * | 1992-03-04 | 1993-12-07 | Ampex Systems Corporation | Method of manufacturing a laminated high frequency magnetic transducer |
US5302461A (en) * | 1992-06-05 | 1994-04-12 | Hewlett-Packard Company | Dielectric films for use in magnetoresistive transducers |
WO1994002938A1 (en) * | 1992-07-17 | 1994-02-03 | Ampex Systems Corporation | Composite metal and ferrite head transducer and manufacturing method therefor |
US5820770A (en) * | 1992-07-21 | 1998-10-13 | Seagate Technology, Inc. | Thin film magnetic head including vias formed in alumina layer and process for making the same |
US5326429A (en) * | 1992-07-21 | 1994-07-05 | Seagate Technology, Inc. | Process for making studless thin film magnetic head |
US5361547A (en) * | 1992-08-28 | 1994-11-08 | International Business Machines Corporation | Ultimate inductive head integrated lapping system |
US5621595A (en) * | 1992-10-20 | 1997-04-15 | Cohen; Uri | Pinched-gap magnetic recording thin film head |
US5945007A (en) * | 1992-10-20 | 1999-08-31 | Cohen; Uri | Method for etching gap-vias in a magnetic thin film head and product |
JPH07153031A (ja) * | 1993-09-20 | 1995-06-16 | Read Rite Corp | 耐摩耗エンドキャップ付き空気浮上式薄膜磁気ヘッド |
US5452166A (en) * | 1993-10-01 | 1995-09-19 | Applied Magnetics Corporation | Thin film magnetic recording head for minimizing undershoots and a method for manufacturing the same |
US5771135A (en) * | 1994-06-13 | 1998-06-23 | International Business Machines Corporation | Vibration damping system for head suspension assemblies |
WO1996016400A2 (en) * | 1994-11-24 | 1996-05-30 | Philips Electronics N.V. | Magnetic head provided with write elements and read elements |
EP0768640A3 (en) * | 1995-10-13 | 1998-11-11 | Ampex Corporation | A small core magnetic head with non-magnetic side support |
US5793579A (en) * | 1995-11-30 | 1998-08-11 | Sanyo Electric Co., Ltd. | Thin film magnetic head and process for producing same |
US5757591A (en) * | 1996-11-25 | 1998-05-26 | International Business Machines Corporation | Magnetoresistive read/inductive write magnetic head assembly fabricated with silicon on hard insulator for improved durability and electrostatic discharge protection and method for manufacturing same |
US6775902B1 (en) * | 1997-07-28 | 2004-08-17 | Western Digital (Fremont) Inc. | Method of making a magnetic head with aligned pole tips |
US6428657B1 (en) * | 1999-08-04 | 2002-08-06 | International Business Machines Corporation | Magnetic read head sensor with a reactively sputtered pinning layer structure |
US6445542B1 (en) | 2000-03-06 | 2002-09-03 | Read-Rite Corporation | Air bearing slider |
US6633459B2 (en) | 2000-06-20 | 2003-10-14 | Seagate Technology Llc | Functional recording-head on-slider lap monitor |
US6570740B1 (en) * | 2000-08-21 | 2003-05-27 | Hewlett-Packard Development Company, L.P. | Tape guide with wear resistant coating |
US6759081B2 (en) * | 2001-05-11 | 2004-07-06 | Asm International, N.V. | Method of depositing thin films for magnetic heads |
US6882503B2 (en) * | 2002-01-29 | 2005-04-19 | Headway Technologies, Inc. | Thin-film magnetic head and method of manufacturing same, and slider of thin-film magnetic head and method of manufacturing same |
JP3948558B2 (ja) * | 2002-07-30 | 2007-07-25 | Tdk株式会社 | 磁気ヘッド、磁気ヘッド装置及び磁気記録再生装置 |
US6776690B2 (en) * | 2002-08-19 | 2004-08-17 | Hitachi Global Storage Technologies Netherlands B.V. | Storage device slider with sacrificial lapping extension |
IL153465A (en) * | 2002-12-16 | 2013-07-31 | Hamafteach Hamistovev Ltd | Stack @ Tool @ Weapon @ Possessing @ Means @ Experience |
US7082013B2 (en) * | 2003-05-06 | 2006-07-25 | International Business Machines Corporation | Method and apparatus for embedding a chip in a substrate to form a composite air bearing surface |
US20050259353A1 (en) * | 2004-05-18 | 2005-11-24 | Exabyte Corporation | Multi-plane thin-film heads |
US7477486B1 (en) | 2005-12-07 | 2009-01-13 | Western Digital (Fremont), Llc | Air bearing slider with a side pad having a shallow recess depth |
US7929248B2 (en) | 2006-05-23 | 2011-04-19 | Seagate Technology Llc | Top bond pad for transducing head interconnect |
US8174793B2 (en) * | 2010-06-22 | 2012-05-08 | Tdk Corporation | Thin film magnetic head and magnetic disk device and electronic component |
US9865286B2 (en) * | 2016-05-31 | 2018-01-09 | Western Digital Technologies, Inc. | Tape array electrical lapping guide design for small stripe TMR sensor |
US10950264B2 (en) * | 2019-06-26 | 2021-03-16 | Seagate Technology Llc | Transducer positions for dual actuator data storage devices |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4971214A (US06566495-20030520-M00011.png) * | 1972-11-14 | 1974-07-10 | ||
JPS5144717A (US06566495-20030520-M00011.png) * | 1974-10-14 | 1976-04-16 | Matsushita Electric Ind Co Ltd |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3414971A (en) * | 1964-06-09 | 1968-12-10 | Honeywell Inc | Method of fabricating read-after-write heads |
US3639701A (en) * | 1970-07-02 | 1972-02-01 | Ibm | Magnetic recording head having a nonmagnetic ferrite gap |
FR2191186B1 (US06566495-20030520-M00011.png) * | 1972-07-03 | 1976-01-16 | Inf Ci Interna Fr | |
US3855625A (en) * | 1973-12-19 | 1974-12-17 | Ibm | Magnetic head slider assembly |
US4001890A (en) * | 1974-08-05 | 1977-01-04 | Honeywell Information Systems, Inc. | Double chip flying head |
US3908194A (en) * | 1974-08-19 | 1975-09-23 | Ibm | Integrated magnetoresistive read, inductive write, batch fabricated magnetic head |
GB1591237A (en) * | 1976-12-13 | 1981-06-17 | Texas Instruments Inc | Magnetic recording/reproducing head |
US4130847A (en) * | 1977-03-31 | 1978-12-19 | International Business Machines Corporation | Corrosion resistant thin film head assembly and method for making |
DE2721452A1 (de) * | 1977-05-12 | 1978-11-16 | Siemens Ag | Integrierte magnetkopfstruktur und verfahren zu ihrer herstellung |
-
1978
- 1978-12-21 US US05/972,101 patent/US4219853A/en not_active Expired - Lifetime
-
1979
- 1979-11-02 JP JP14141979A patent/JPS5584018A/ja active Granted
- 1979-12-10 EP EP79105065A patent/EP0013363B1/en not_active Expired
- 1979-12-10 DE DE7979105065T patent/DE2960790D1/de not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4971214A (US06566495-20030520-M00011.png) * | 1972-11-14 | 1974-07-10 | ||
JPS5144717A (US06566495-20030520-M00011.png) * | 1974-10-14 | 1976-04-16 | Matsushita Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5584018A (en) | 1980-06-24 |
EP0013363A1 (en) | 1980-07-23 |
DE2960790D1 (en) | 1981-11-26 |
US4219853A (en) | 1980-08-26 |
EP0013363B1 (en) | 1981-09-09 |
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