JPS638132Y2 - - Google Patents

Info

Publication number
JPS638132Y2
JPS638132Y2 JP1983045144U JP4514483U JPS638132Y2 JP S638132 Y2 JPS638132 Y2 JP S638132Y2 JP 1983045144 U JP1983045144 U JP 1983045144U JP 4514483 U JP4514483 U JP 4514483U JP S638132 Y2 JPS638132 Y2 JP S638132Y2
Authority
JP
Japan
Prior art keywords
temperature
wafer
temperature sensor
liquid
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983045144U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59151441U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4514483U priority Critical patent/JPS59151441U/ja
Publication of JPS59151441U publication Critical patent/JPS59151441U/ja
Application granted granted Critical
Publication of JPS638132Y2 publication Critical patent/JPS638132Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP4514483U 1983-03-29 1983-03-29 半導体試験装置 Granted JPS59151441U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4514483U JPS59151441U (ja) 1983-03-29 1983-03-29 半導体試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4514483U JPS59151441U (ja) 1983-03-29 1983-03-29 半導体試験装置

Publications (2)

Publication Number Publication Date
JPS59151441U JPS59151441U (ja) 1984-10-11
JPS638132Y2 true JPS638132Y2 (enrdf_load_stackoverflow) 1988-03-10

Family

ID=30175660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4514483U Granted JPS59151441U (ja) 1983-03-29 1983-03-29 半導体試験装置

Country Status (1)

Country Link
JP (1) JPS59151441U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS54128289A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Test method for semiconductor pellet

Also Published As

Publication number Publication date
JPS59151441U (ja) 1984-10-11

Similar Documents

Publication Publication Date Title
US6552561B2 (en) Apparatus and method for controlling temperature in a device under test using integrated temperature sensitive diode
JPH0447968B2 (enrdf_load_stackoverflow)
JP2005072143A (ja) プローブ装置
JP2001210683A (ja) プローバのチャック機構
JP2012231040A (ja) 温度校正装置及び温度校正方法
JPS638132Y2 (enrdf_load_stackoverflow)
JP6157270B2 (ja) プローブ装置及びプローブ方法
JPH05152389A (ja) プローブカード
JP2008053282A (ja) プローバ
TWI684016B (zh) 具有功率校準之量測系統及量測方法
JPH10199947A (ja) 薄板の反り測定方法および装置
JPH04359445A (ja) 温度試験用プロービング装置
JP3995800B2 (ja) 半導体装置の検査方法
JP2649832B2 (ja) ウエハ検査装置
JPH02234085A (ja) 半導体装置
JPH01227450A (ja) ウエハプローバ
JPS6313340A (ja) 半導体素子の特性測定方法
JP2004253716A (ja) プローブ装置
JPH0346246A (ja) 検査装置
SU1174211A2 (ru) Устройство дл контрол микросварных соединений в процессе контактной сварки
JPS6236282Y2 (enrdf_load_stackoverflow)
JPS61161748A (ja) 半導体ウエハ
JPH02242174A (ja) レジスト耐熱評価装置
JPH0864651A (ja) 微細配線の温度測定方法及び装置
JPS58158939A (ja) 半導体ウエハ−、チツプの測定方法