JPS59151441U - 半導体試験装置 - Google Patents

半導体試験装置

Info

Publication number
JPS59151441U
JPS59151441U JP4514483U JP4514483U JPS59151441U JP S59151441 U JPS59151441 U JP S59151441U JP 4514483 U JP4514483 U JP 4514483U JP 4514483 U JP4514483 U JP 4514483U JP S59151441 U JPS59151441 U JP S59151441U
Authority
JP
Japan
Prior art keywords
test equipment
semiconductor test
abstract
wafer
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4514483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638132Y2 (enrdf_load_stackoverflow
Inventor
大河原　俊徳
進清 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP4514483U priority Critical patent/JPS59151441U/ja
Publication of JPS59151441U publication Critical patent/JPS59151441U/ja
Application granted granted Critical
Publication of JPS638132Y2 publication Critical patent/JPS638132Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP4514483U 1983-03-29 1983-03-29 半導体試験装置 Granted JPS59151441U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4514483U JPS59151441U (ja) 1983-03-29 1983-03-29 半導体試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4514483U JPS59151441U (ja) 1983-03-29 1983-03-29 半導体試験装置

Publications (2)

Publication Number Publication Date
JPS59151441U true JPS59151441U (ja) 1984-10-11
JPS638132Y2 JPS638132Y2 (enrdf_load_stackoverflow) 1988-03-10

Family

ID=30175660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4514483U Granted JPS59151441U (ja) 1983-03-29 1983-03-29 半導体試験装置

Country Status (1)

Country Link
JP (1) JPS59151441U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS54128289A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Test method for semiconductor pellet

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS54128289A (en) * 1978-03-29 1979-10-04 Hitachi Ltd Test method for semiconductor pellet

Also Published As

Publication number Publication date
JPS638132Y2 (enrdf_load_stackoverflow) 1988-03-10

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