JPS54128289A - Test method for semiconductor pellet - Google Patents

Test method for semiconductor pellet

Info

Publication number
JPS54128289A
JPS54128289A JP3554178A JP3554178A JPS54128289A JP S54128289 A JPS54128289 A JP S54128289A JP 3554178 A JP3554178 A JP 3554178A JP 3554178 A JP3554178 A JP 3554178A JP S54128289 A JPS54128289 A JP S54128289A
Authority
JP
Japan
Prior art keywords
stage
pellet
mat
test
semiconductor pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3554178A
Other languages
Japanese (ja)
Inventor
Kenpo Sumizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3554178A priority Critical patent/JPS54128289A/en
Publication of JPS54128289A publication Critical patent/JPS54128289A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To ensure a high mutual contact to eliminate the local heat generation when carrying out the electric conduction test by placing the semiconductor pellet on the metal-made stage, by providing an elastic thin mat featuring high heat and electric conductivity between the pellet and the stage.
CONSTITUTION: Elastic thin mat 2 featuring high heat and electric conductivity and composed by mixing the copper powder into the rubber substrate material is laied on metal stage 1 for the test of the semiconductor pellet. Then pellet 3 to be tested is placed on mat 2. Under these conditions, the current is flown to both pellet 3 and stage 1 via a probe to carry out the prescribed test. In such way, some unevenness on stage 1, if any, can be absorbed due to the elasticity of mat 2. Thus, the local heat generation is eliminated, increasing the accuracy of the test data.
COPYRIGHT: (C)1979,JPO&Japio
JP3554178A 1978-03-29 1978-03-29 Test method for semiconductor pellet Pending JPS54128289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3554178A JPS54128289A (en) 1978-03-29 1978-03-29 Test method for semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3554178A JPS54128289A (en) 1978-03-29 1978-03-29 Test method for semiconductor pellet

Publications (1)

Publication Number Publication Date
JPS54128289A true JPS54128289A (en) 1979-10-04

Family

ID=12444582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3554178A Pending JPS54128289A (en) 1978-03-29 1978-03-29 Test method for semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS54128289A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151441U (en) * 1983-03-29 1984-10-11 横河電機株式会社 semiconductor test equipment
US20140311668A1 (en) * 2011-11-17 2014-10-23 Yuji Yanagi Method for producing organic el panel and device for sealing organic el panel

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151441U (en) * 1983-03-29 1984-10-11 横河電機株式会社 semiconductor test equipment
JPS638132Y2 (en) * 1983-03-29 1988-03-10
US20140311668A1 (en) * 2011-11-17 2014-10-23 Yuji Yanagi Method for producing organic el panel and device for sealing organic el panel
US9661718B2 (en) * 2011-11-17 2017-05-23 Mitsubishi Heavy Industries, Ltd. Method for producing organic EL panel and device for sealing organic EL panel

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