JPS5350982A - Low-high temperature testing station - Google Patents

Low-high temperature testing station

Info

Publication number
JPS5350982A
JPS5350982A JP12586476A JP12586476A JPS5350982A JP S5350982 A JPS5350982 A JP S5350982A JP 12586476 A JP12586476 A JP 12586476A JP 12586476 A JP12586476 A JP 12586476A JP S5350982 A JPS5350982 A JP S5350982A
Authority
JP
Japan
Prior art keywords
low
high temperature
testing station
temperature testing
lsis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12586476A
Other languages
Japanese (ja)
Inventor
Yukio Oda
Zenji Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12586476A priority Critical patent/JPS5350982A/en
Publication of JPS5350982A publication Critical patent/JPS5350982A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate temperature controlling by current as well as to reduce power consumption and make the unit compact by using a Peltier effect semiconductor element in the test station for testing electrical characteristics of LSIs.
COPYRIGHT: (C)1978,JPO&Japio
JP12586476A 1976-10-20 1976-10-20 Low-high temperature testing station Pending JPS5350982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12586476A JPS5350982A (en) 1976-10-20 1976-10-20 Low-high temperature testing station

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12586476A JPS5350982A (en) 1976-10-20 1976-10-20 Low-high temperature testing station

Publications (1)

Publication Number Publication Date
JPS5350982A true JPS5350982A (en) 1978-05-09

Family

ID=14920814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12586476A Pending JPS5350982A (en) 1976-10-20 1976-10-20 Low-high temperature testing station

Country Status (1)

Country Link
JP (1) JPS5350982A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149467U (en) * 1981-03-16 1982-09-20
JPS5974729U (en) * 1982-11-10 1984-05-21 クラリオン株式会社 Sample measuring device
JPS61221660A (en) * 1984-09-03 1986-10-02 Nec Corp Electron beam measuring instrument
JPS6391577A (en) * 1986-10-06 1988-04-22 Saamotetsuku:Kk Cooler-heater for temperature test
JPH04144248A (en) * 1990-10-05 1992-05-18 Nec Corp Testing method of semiconductor integrated circuit
US6970007B2 (en) 2002-04-23 2005-11-29 Fujitsu Limited Semiconductor device low temperature test apparatus using electronic cooling element
JP2006292774A (en) * 2006-07-31 2006-10-26 Akim Kk Method and system for adjustment test of electronic component
JP2008166474A (en) * 2006-12-28 2008-07-17 Espec Corp Environmental testing device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149467U (en) * 1981-03-16 1982-09-20
JPS5974729U (en) * 1982-11-10 1984-05-21 クラリオン株式会社 Sample measuring device
JPS6246265Y2 (en) * 1982-11-10 1987-12-12
JPS61221660A (en) * 1984-09-03 1986-10-02 Nec Corp Electron beam measuring instrument
JPS6391577A (en) * 1986-10-06 1988-04-22 Saamotetsuku:Kk Cooler-heater for temperature test
JPH04144248A (en) * 1990-10-05 1992-05-18 Nec Corp Testing method of semiconductor integrated circuit
US6970007B2 (en) 2002-04-23 2005-11-29 Fujitsu Limited Semiconductor device low temperature test apparatus using electronic cooling element
JP2006292774A (en) * 2006-07-31 2006-10-26 Akim Kk Method and system for adjustment test of electronic component
JP2008166474A (en) * 2006-12-28 2008-07-17 Espec Corp Environmental testing device

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