JPS5350982A - Low-high temperature testing station - Google Patents
Low-high temperature testing stationInfo
- Publication number
- JPS5350982A JPS5350982A JP12586476A JP12586476A JPS5350982A JP S5350982 A JPS5350982 A JP S5350982A JP 12586476 A JP12586476 A JP 12586476A JP 12586476 A JP12586476 A JP 12586476A JP S5350982 A JPS5350982 A JP S5350982A
- Authority
- JP
- Japan
- Prior art keywords
- low
- high temperature
- testing station
- temperature testing
- lsis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To facilitate temperature controlling by current as well as to reduce power consumption and make the unit compact by using a Peltier effect semiconductor element in the test station for testing electrical characteristics of LSIs.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12586476A JPS5350982A (en) | 1976-10-20 | 1976-10-20 | Low-high temperature testing station |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12586476A JPS5350982A (en) | 1976-10-20 | 1976-10-20 | Low-high temperature testing station |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5350982A true JPS5350982A (en) | 1978-05-09 |
Family
ID=14920814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12586476A Pending JPS5350982A (en) | 1976-10-20 | 1976-10-20 | Low-high temperature testing station |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5350982A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149467U (en) * | 1981-03-16 | 1982-09-20 | ||
JPS5974729U (en) * | 1982-11-10 | 1984-05-21 | クラリオン株式会社 | Sample measuring device |
JPS61221660A (en) * | 1984-09-03 | 1986-10-02 | Nec Corp | Electron beam measuring instrument |
JPS6391577A (en) * | 1986-10-06 | 1988-04-22 | Saamotetsuku:Kk | Cooler-heater for temperature test |
JPH04144248A (en) * | 1990-10-05 | 1992-05-18 | Nec Corp | Testing method of semiconductor integrated circuit |
US6970007B2 (en) | 2002-04-23 | 2005-11-29 | Fujitsu Limited | Semiconductor device low temperature test apparatus using electronic cooling element |
JP2006292774A (en) * | 2006-07-31 | 2006-10-26 | Akim Kk | Method and system for adjustment test of electronic component |
JP2008166474A (en) * | 2006-12-28 | 2008-07-17 | Espec Corp | Environmental testing device |
-
1976
- 1976-10-20 JP JP12586476A patent/JPS5350982A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149467U (en) * | 1981-03-16 | 1982-09-20 | ||
JPS5974729U (en) * | 1982-11-10 | 1984-05-21 | クラリオン株式会社 | Sample measuring device |
JPS6246265Y2 (en) * | 1982-11-10 | 1987-12-12 | ||
JPS61221660A (en) * | 1984-09-03 | 1986-10-02 | Nec Corp | Electron beam measuring instrument |
JPS6391577A (en) * | 1986-10-06 | 1988-04-22 | Saamotetsuku:Kk | Cooler-heater for temperature test |
JPH04144248A (en) * | 1990-10-05 | 1992-05-18 | Nec Corp | Testing method of semiconductor integrated circuit |
US6970007B2 (en) | 2002-04-23 | 2005-11-29 | Fujitsu Limited | Semiconductor device low temperature test apparatus using electronic cooling element |
JP2006292774A (en) * | 2006-07-31 | 2006-10-26 | Akim Kk | Method and system for adjustment test of electronic component |
JP2008166474A (en) * | 2006-12-28 | 2008-07-17 | Espec Corp | Environmental testing device |
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