JPS6380865U - - Google Patents
Info
- Publication number
- JPS6380865U JPS6380865U JP17563286U JP17563286U JPS6380865U JP S6380865 U JPS6380865 U JP S6380865U JP 17563286 U JP17563286 U JP 17563286U JP 17563286 U JP17563286 U JP 17563286U JP S6380865 U JPS6380865 U JP S6380865U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- conductive layer
- silicon substrate
- layer
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17563286U JPS6380865U (ro) | 1986-11-15 | 1986-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17563286U JPS6380865U (ro) | 1986-11-15 | 1986-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6380865U true JPS6380865U (ro) | 1988-05-27 |
Family
ID=31115139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17563286U Pending JPS6380865U (ro) | 1986-11-15 | 1986-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6380865U (ro) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01302863A (ja) * | 1988-05-31 | 1989-12-06 | Sony Corp | Ｍｉｓ型トランジスタの製造方法 |
-
1986
- 1986-11-15 JP JP17563286U patent/JPS6380865U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01302863A (ja) * | 1988-05-31 | 1989-12-06 | Sony Corp | Ｍｉｓ型トランジスタの製造方法 |
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