JPS6376360A - 半導体集積回路の製造方法 - Google Patents

半導体集積回路の製造方法

Info

Publication number
JPS6376360A
JPS6376360A JP61220700A JP22070086A JPS6376360A JP S6376360 A JPS6376360 A JP S6376360A JP 61220700 A JP61220700 A JP 61220700A JP 22070086 A JP22070086 A JP 22070086A JP S6376360 A JPS6376360 A JP S6376360A
Authority
JP
Japan
Prior art keywords
region
diffusion layer
layer
epitaxial layer
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61220700A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577301B2 (enrdf_load_stackoverflow
Inventor
Teruo Tabata
田端　輝夫
Toshiyuki Okoda
敏幸 大古田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP61220700A priority Critical patent/JPS6376360A/ja
Publication of JPS6376360A publication Critical patent/JPS6376360A/ja
Publication of JPH0577301B2 publication Critical patent/JPH0577301B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0116—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including integrated injection logic [I2L]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Bipolar Integrated Circuits (AREA)
JP61220700A 1986-09-18 1986-09-18 半導体集積回路の製造方法 Granted JPS6376360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61220700A JPS6376360A (ja) 1986-09-18 1986-09-18 半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61220700A JPS6376360A (ja) 1986-09-18 1986-09-18 半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS6376360A true JPS6376360A (ja) 1988-04-06
JPH0577301B2 JPH0577301B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=16755120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61220700A Granted JPS6376360A (ja) 1986-09-18 1986-09-18 半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS6376360A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350686A (en) * 1976-10-19 1978-05-09 Mitsubishi Electric Corp Production of semiconductor integrated circuit
JPS5384578A (en) * 1976-12-29 1978-07-26 Fujitsu Ltd Semiconductor integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350686A (en) * 1976-10-19 1978-05-09 Mitsubishi Electric Corp Production of semiconductor integrated circuit
JPS5384578A (en) * 1976-12-29 1978-07-26 Fujitsu Ltd Semiconductor integrated circuit

Also Published As

Publication number Publication date
JPH0577301B2 (enrdf_load_stackoverflow) 1993-10-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term