JPS6366050B2 - - Google Patents

Info

Publication number
JPS6366050B2
JPS6366050B2 JP55128946A JP12894680A JPS6366050B2 JP S6366050 B2 JPS6366050 B2 JP S6366050B2 JP 55128946 A JP55128946 A JP 55128946A JP 12894680 A JP12894680 A JP 12894680A JP S6366050 B2 JPS6366050 B2 JP S6366050B2
Authority
JP
Japan
Prior art keywords
sample
reaction tube
gas
wafer
flowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55128946A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5753942A (en
Inventor
Junichi Nishizawa
Akira Ito
Tadahiro Oomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP55128946A priority Critical patent/JPS5753942A/ja
Publication of JPS5753942A publication Critical patent/JPS5753942A/ja
Publication of JPS6366050B2 publication Critical patent/JPS6366050B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—
JP55128946A 1980-09-17 1980-09-17 Method of oxidation and diffusion Granted JPS5753942A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55128946A JPS5753942A (en) 1980-09-17 1980-09-17 Method of oxidation and diffusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55128946A JPS5753942A (en) 1980-09-17 1980-09-17 Method of oxidation and diffusion

Publications (2)

Publication Number Publication Date
JPS5753942A JPS5753942A (en) 1982-03-31
JPS6366050B2 true JPS6366050B2 (esLanguage) 1988-12-19

Family

ID=14997309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55128946A Granted JPS5753942A (en) 1980-09-17 1980-09-17 Method of oxidation and diffusion

Country Status (1)

Country Link
JP (1) JPS5753942A (esLanguage)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212944U (esLanguage) * 1985-07-09 1987-01-26

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51141581A (en) * 1975-06-02 1976-12-06 Hitachi Ltd Method for controlling crystal growth in the gaseous phase
JPS5298474A (en) * 1976-02-13 1977-08-18 Hitachi Ltd Vapor phase growth under reduced pressure

Also Published As

Publication number Publication date
JPS5753942A (en) 1982-03-31

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