JPS6362099B2 - - Google Patents

Info

Publication number
JPS6362099B2
JPS6362099B2 JP56117261A JP11726181A JPS6362099B2 JP S6362099 B2 JPS6362099 B2 JP S6362099B2 JP 56117261 A JP56117261 A JP 56117261A JP 11726181 A JP11726181 A JP 11726181A JP S6362099 B2 JPS6362099 B2 JP S6362099B2
Authority
JP
Japan
Prior art keywords
bonding
die
lead
magnification
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56117261A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5818934A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56117261A priority Critical patent/JPS5818934A/ja
Publication of JPS5818934A publication Critical patent/JPS5818934A/ja
Publication of JPS6362099B2 publication Critical patent/JPS6362099B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W99/00—

Landscapes

  • Wire Bonding (AREA)
JP56117261A 1981-07-27 1981-07-27 インナ−リ−ドボンデイング装置における試料監視装置 Granted JPS5818934A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56117261A JPS5818934A (ja) 1981-07-27 1981-07-27 インナ−リ−ドボンデイング装置における試料監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56117261A JPS5818934A (ja) 1981-07-27 1981-07-27 インナ−リ−ドボンデイング装置における試料監視装置

Publications (2)

Publication Number Publication Date
JPS5818934A JPS5818934A (ja) 1983-02-03
JPS6362099B2 true JPS6362099B2 (enExample) 1988-12-01

Family

ID=14707377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56117261A Granted JPS5818934A (ja) 1981-07-27 1981-07-27 インナ−リ−ドボンデイング装置における試料監視装置

Country Status (1)

Country Link
JP (1) JPS5818934A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2592337B2 (ja) * 1989-11-20 1997-03-19 株式会社カイジョー テープボンディング方法

Also Published As

Publication number Publication date
JPS5818934A (ja) 1983-02-03

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