JPS6359565B2 - - Google Patents
Info
- Publication number
- JPS6359565B2 JPS6359565B2 JP55069112A JP6911280A JPS6359565B2 JP S6359565 B2 JPS6359565 B2 JP S6359565B2 JP 55069112 A JP55069112 A JP 55069112A JP 6911280 A JP6911280 A JP 6911280A JP S6359565 B2 JPS6359565 B2 JP S6359565B2
- Authority
- JP
- Japan
- Prior art keywords
- movable part
- substrate
- manufacturing
- mechanical
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/12—Mounting in enclosures for networks with interaction of optical and acoustic waves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
- G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
- G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
- G06K7/10554—Moving beam scanning
- G06K7/10594—Beam path
- G06K7/10603—Basic scanning using moving elements
- G06K7/10633—Basic scanning using moving elements by oscillation
- G06K7/10643—Activating means
- G06K7/10653—Activating means using flexible or piezoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/02—Details
- H04R9/04—Construction, mounting, or centering of coil
- H04R9/046—Construction
- H04R9/047—Construction in which the windings of the moving coil lay in the same plane
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Acoustics & Sound (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Signal Processing (AREA)
- Toxicology (AREA)
- Artificial Intelligence (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6911280A JPS56164928A (en) | 1980-05-22 | 1980-05-22 | Mechanical vibrator |
US06/242,627 US4421381A (en) | 1980-04-04 | 1981-03-11 | Mechanical vibrating element |
GB8108973A GB2075762B (en) | 1980-04-04 | 1981-03-23 | Mechanical vibrating element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6911280A JPS56164928A (en) | 1980-05-22 | 1980-05-22 | Mechanical vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56164928A JPS56164928A (en) | 1981-12-18 |
JPS6359565B2 true JPS6359565B2 (enrdf_load_stackoverflow) | 1988-11-21 |
Family
ID=13393218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6911280A Granted JPS56164928A (en) | 1980-04-04 | 1980-05-22 | Mechanical vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56164928A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5897610A (ja) * | 1981-12-08 | 1983-06-10 | Yokogawa Hokushin Electric Corp | 捩り−周波数変換器 |
EP1850633B1 (en) | 2005-02-17 | 2016-10-26 | Panasonic Intellectual Property Management Co., Ltd. | Piezoelectric speaker and method for manufacturing the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2304104A1 (de) * | 1972-06-28 | 1974-01-10 | Zimmer Johannes | Verfahren zur herstellung eines tiefen oder durchgehenden druckmusters bei dickem textilgut und einrichtung zu dessen durchfuehrung |
JPS5115388A (ja) * | 1974-07-29 | 1976-02-06 | Citizen Watch Co Ltd | Suishoshindoshi |
JPS5487083A (en) * | 1977-12-22 | 1979-07-11 | Seiko Instr & Electronics Ltd | Piezoelectric oscillator |
-
1980
- 1980-05-22 JP JP6911280A patent/JPS56164928A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56164928A (en) | 1981-12-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4001029B2 (ja) | 音叉型圧電振動片及びその製造方法、圧電デバイス | |
EP0797300B1 (en) | Piezoelectric vibrator and manufacturing method thereof | |
US20030167841A1 (en) | Micro-electro-mechanical gyroscope | |
JP2009526420A (ja) | 圧電薄膜共振器(fbar)の周波数のチューニング | |
JP2005533400A (ja) | 極超短波mem共振器のための中心質量の減少したマイクロブリッジ構造 | |
CN101515026A (zh) | 谐振式微机电系统磁场传感器及测量方法 | |
JPH11512816A (ja) | モノリシック加速度計量トランスデューサ | |
US9413333B2 (en) | Nanomechanical resonator array and production method thereof | |
JP5468444B2 (ja) | 音叉型水晶片の製造方法 | |
JP2011217040A (ja) | 音叉型水晶片の製造方法 | |
JP3952811B2 (ja) | 圧電振動片、圧電振動片の製造方法および圧電デバイス | |
JPH0643179A (ja) | 加速度センサ及び該センサの製造方法 | |
JP4010218B2 (ja) | 圧電振動片の製造方法 | |
JPS6359565B2 (enrdf_load_stackoverflow) | ||
JP2022119126A (ja) | 圧電素子、圧電装置、および圧電素子の製造方法 | |
JP5465572B2 (ja) | 音叉型水晶片の製造方法 | |
JPS6342742Y2 (enrdf_load_stackoverflow) | ||
JP4517332B2 (ja) | 水晶振動子と水晶ユニットと水晶発振器の製造方法 | |
JPS6281807A (ja) | 圧電薄膜共振子 | |
JP2009207022A (ja) | 圧電振動片、圧電デバイス及び音叉型圧電振動子の周波数調整方法 | |
JP2010187059A (ja) | ウォーク型振動片およびその製造方法 | |
JP3230359B2 (ja) | 共振型振動素子 | |
JP2017207283A (ja) | 振動素子の製造方法 | |
US20100289096A1 (en) | Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level | |
JP4554118B2 (ja) | 音叉型角速度センサ素子の製造方法 |