JPS56164928A - Mechanical vibrator - Google Patents

Mechanical vibrator

Info

Publication number
JPS56164928A
JPS56164928A JP6911280A JP6911280A JPS56164928A JP S56164928 A JPS56164928 A JP S56164928A JP 6911280 A JP6911280 A JP 6911280A JP 6911280 A JP6911280 A JP 6911280A JP S56164928 A JPS56164928 A JP S56164928A
Authority
JP
Japan
Prior art keywords
frame
mechanical vibrator
substrate
movable part
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6911280A
Other languages
Japanese (ja)
Other versions
JPS6359565B2 (en
Inventor
Toshitsugu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP6911280A priority Critical patent/JPS56164928A/en
Priority to US06/242,627 priority patent/US4421381A/en
Priority to GB8108973A priority patent/GB2075762B/en
Publication of JPS56164928A publication Critical patent/JPS56164928A/en
Publication of JPS6359565B2 publication Critical patent/JPS6359565B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/12—Mounting in enclosures for networks with interaction of optical and acoustic waves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/02—Details
    • H04R9/04—Construction, mounting, or centering of coil
    • H04R9/046—Construction
    • H04R9/047—Construction in which the windings of the moving coil lay in the same plane

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Toxicology (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain an inexpensive mechanical vibrator of simple construction and uniform quality by such constitution in which a frame and a movable part supported by the frame are formed to one insulation substrate, conductor patterns are formed to the movable part, and current is flowed under application of magnetic field. CONSTITUTION:A frame 1 and a movable part 2 supported to this by way of spring parts 31, 32 are formed to a substrate of crystal, Si or glass of, for example, about 5X10<-5>m thickness. Conductor patterns 4 are provided on both surfaces of the part 2, and are electrically connected through a central through-hole 21. When the magnetic field in the arrow B direction past the surface of the substrate is applied and current is flowed to the patterns 4 through a lead wire 51, the part 2 makes natural oscillation. The number of the oscillations thereof changes depending upon the viscosity or density of the fluid present around the part 2, and when the number of the natural oscillations thereof is measured, the viscosity or density of the fluid around the same is known. Thereby, the inexpensive mechanical vibrator of simple construction and uniform quality is obtained.
JP6911280A 1980-04-04 1980-05-22 Mechanical vibrator Granted JPS56164928A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6911280A JPS56164928A (en) 1980-05-22 1980-05-22 Mechanical vibrator
US06/242,627 US4421381A (en) 1980-04-04 1981-03-11 Mechanical vibrating element
GB8108973A GB2075762B (en) 1980-04-04 1981-03-23 Mechanical vibrating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6911280A JPS56164928A (en) 1980-05-22 1980-05-22 Mechanical vibrator

Publications (2)

Publication Number Publication Date
JPS56164928A true JPS56164928A (en) 1981-12-18
JPS6359565B2 JPS6359565B2 (en) 1988-11-21

Family

ID=13393218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6911280A Granted JPS56164928A (en) 1980-04-04 1980-05-22 Mechanical vibrator

Country Status (1)

Country Link
JP (1) JPS56164928A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897610A (en) * 1981-12-08 1983-06-10 Yokogawa Hokushin Electric Corp Torsion-to-frequency transducer
WO2006087866A1 (en) * 2005-02-17 2006-08-24 Matsushita Electric Industrial Co., Ltd. Piezoelectric speaker and method of manufacturing the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4948985A (en) * 1972-06-28 1974-05-11
JPS5115388A (en) * 1974-07-29 1976-02-06 Citizen Watch Co Ltd SUISHOSHINDOSHI
JPS5487083A (en) * 1977-12-22 1979-07-11 Seiko Instr & Electronics Ltd Piezoelectric oscillator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4948985A (en) * 1972-06-28 1974-05-11
JPS5115388A (en) * 1974-07-29 1976-02-06 Citizen Watch Co Ltd SUISHOSHINDOSHI
JPS5487083A (en) * 1977-12-22 1979-07-11 Seiko Instr & Electronics Ltd Piezoelectric oscillator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897610A (en) * 1981-12-08 1983-06-10 Yokogawa Hokushin Electric Corp Torsion-to-frequency transducer
JPH0136564B2 (en) * 1981-12-08 1989-08-01 Yokogawa Electric Corp
WO2006087866A1 (en) * 2005-02-17 2006-08-24 Matsushita Electric Industrial Co., Ltd. Piezoelectric speaker and method of manufacturing the same
US8014547B2 (en) 2005-02-17 2011-09-06 Panasonic Corporation Piezoelectric speaker and method for manufacturing the same
JP4846710B2 (en) * 2005-02-17 2011-12-28 パナソニック株式会社 Piezoelectric speaker and method for manufacturing the same

Also Published As

Publication number Publication date
JPS6359565B2 (en) 1988-11-21

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