JPS635225Y2 - - Google Patents
Info
- Publication number
- JPS635225Y2 JPS635225Y2 JP1982019478U JP1947882U JPS635225Y2 JP S635225 Y2 JPS635225 Y2 JP S635225Y2 JP 1982019478 U JP1982019478 U JP 1982019478U JP 1947882 U JP1947882 U JP 1947882U JP S635225 Y2 JPS635225 Y2 JP S635225Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- furnace core
- core tube
- tube
- glass tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 48
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000003466 welding Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008439 repair process Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1947882U JPS58122441U (ja) | 1982-02-15 | 1982-02-15 | 半導体用石英ガラス炉芯管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1947882U JPS58122441U (ja) | 1982-02-15 | 1982-02-15 | 半導体用石英ガラス炉芯管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58122441U JPS58122441U (ja) | 1983-08-20 |
| JPS635225Y2 true JPS635225Y2 (fr) | 1988-02-12 |
Family
ID=30031686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1947882U Granted JPS58122441U (ja) | 1982-02-15 | 1982-02-15 | 半導体用石英ガラス炉芯管 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58122441U (fr) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50145260U (fr) * | 1974-05-20 | 1975-12-01 |
-
1982
- 1982-02-15 JP JP1947882U patent/JPS58122441U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58122441U (ja) | 1983-08-20 |
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