JPS6342524Y2 - - Google Patents
Info
- Publication number
- JPS6342524Y2 JPS6342524Y2 JP17857983U JP17857983U JPS6342524Y2 JP S6342524 Y2 JPS6342524 Y2 JP S6342524Y2 JP 17857983 U JP17857983 U JP 17857983U JP 17857983 U JP17857983 U JP 17857983U JP S6342524 Y2 JPS6342524 Y2 JP S6342524Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- core tube
- furnace core
- insulating cap
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011810 insulating material Substances 0.000 claims description 11
- 239000007789 gas Substances 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000835 fiber Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17857983U JPS6085837U (ja) | 1983-11-17 | 1983-11-17 | 炉芯管用断熱キヤツプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17857983U JPS6085837U (ja) | 1983-11-17 | 1983-11-17 | 炉芯管用断熱キヤツプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6085837U JPS6085837U (ja) | 1985-06-13 |
| JPS6342524Y2 true JPS6342524Y2 (fr) | 1988-11-08 |
Family
ID=30387677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17857983U Granted JPS6085837U (ja) | 1983-11-17 | 1983-11-17 | 炉芯管用断熱キヤツプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6085837U (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0745953Y2 (ja) * | 1988-07-29 | 1995-10-18 | 旭硝子株式会社 | 熱処理炉用シール断熱材 |
-
1983
- 1983-11-17 JP JP17857983U patent/JPS6085837U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6085837U (ja) | 1985-06-13 |
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