JPS635211Y2 - - Google Patents

Info

Publication number
JPS635211Y2
JPS635211Y2 JP1983185465U JP18546583U JPS635211Y2 JP S635211 Y2 JPS635211 Y2 JP S635211Y2 JP 1983185465 U JP1983185465 U JP 1983185465U JP 18546583 U JP18546583 U JP 18546583U JP S635211 Y2 JPS635211 Y2 JP S635211Y2
Authority
JP
Japan
Prior art keywords
loader
wafer
cleaning
loaders
transports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983185465U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6092836U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983185465U priority Critical patent/JPS6092836U/ja
Publication of JPS6092836U publication Critical patent/JPS6092836U/ja
Application granted granted Critical
Publication of JPS635211Y2 publication Critical patent/JPS635211Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1983185465U 1983-11-30 1983-11-30 クリーニングウェハの保持機構 Granted JPS6092836U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983185465U JPS6092836U (ja) 1983-11-30 1983-11-30 クリーニングウェハの保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983185465U JPS6092836U (ja) 1983-11-30 1983-11-30 クリーニングウェハの保持機構

Publications (2)

Publication Number Publication Date
JPS6092836U JPS6092836U (ja) 1985-06-25
JPS635211Y2 true JPS635211Y2 (enExample) 1988-02-12

Family

ID=30400854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983185465U Granted JPS6092836U (ja) 1983-11-30 1983-11-30 クリーニングウェハの保持機構

Country Status (1)

Country Link
JP (1) JPS6092836U (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622258B2 (ja) * 1987-07-24 1994-03-23 日立電子エンジニアリング株式会社 ウエハ表面検査装置
JPS6447041A (en) * 1987-08-18 1989-02-21 Hitachi Electr Eng Wafer surface inspecting equipment
JP2627787B2 (ja) * 1988-08-24 1997-07-09 株式会社東京精密 プロービング機のクリーニングウェハ収容装置

Also Published As

Publication number Publication date
JPS6092836U (ja) 1985-06-25

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