JPS634936B2 - - Google Patents

Info

Publication number
JPS634936B2
JPS634936B2 JP57148295A JP14829582A JPS634936B2 JP S634936 B2 JPS634936 B2 JP S634936B2 JP 57148295 A JP57148295 A JP 57148295A JP 14829582 A JP14829582 A JP 14829582A JP S634936 B2 JPS634936 B2 JP S634936B2
Authority
JP
Japan
Prior art keywords
detection
cassette
thin
processing
dummy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57148295A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5936940A (ja
Inventor
Mikio Shoda
Kozo Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP57148295A priority Critical patent/JPS5936940A/ja
Publication of JPS5936940A publication Critical patent/JPS5936940A/ja
Publication of JPS634936B2 publication Critical patent/JPS634936B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0618—Apparatus for monitoring, sorting, marking, testing or measuring using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment

Landscapes

  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP57148295A 1982-08-25 1982-08-25 一群の薄片処理における検出方法 Granted JPS5936940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57148295A JPS5936940A (ja) 1982-08-25 1982-08-25 一群の薄片処理における検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57148295A JPS5936940A (ja) 1982-08-25 1982-08-25 一群の薄片処理における検出方法

Publications (2)

Publication Number Publication Date
JPS5936940A JPS5936940A (ja) 1984-02-29
JPS634936B2 true JPS634936B2 (https=) 1988-02-01

Family

ID=15449578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57148295A Granted JPS5936940A (ja) 1982-08-25 1982-08-25 一群の薄片処理における検出方法

Country Status (1)

Country Link
JP (1) JPS5936940A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018006771B4 (de) 2018-08-27 2022-09-08 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Übertragen elektronischer Bauteile von einem ersten zu einem zweiten Träger

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018006771B4 (de) 2018-08-27 2022-09-08 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Übertragen elektronischer Bauteile von einem ersten zu einem zweiten Träger

Also Published As

Publication number Publication date
JPS5936940A (ja) 1984-02-29

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