JPS6342138Y2 - - Google Patents

Info

Publication number
JPS6342138Y2
JPS6342138Y2 JP1985000340U JP34085U JPS6342138Y2 JP S6342138 Y2 JPS6342138 Y2 JP S6342138Y2 JP 1985000340 U JP1985000340 U JP 1985000340U JP 34085 U JP34085 U JP 34085U JP S6342138 Y2 JPS6342138 Y2 JP S6342138Y2
Authority
JP
Japan
Prior art keywords
support
wafer carrier
pair
corrosion
swinging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985000340U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116765U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985000340U priority Critical patent/JPS6342138Y2/ja
Publication of JPS61116765U publication Critical patent/JPS61116765U/ja
Application granted granted Critical
Publication of JPS6342138Y2 publication Critical patent/JPS6342138Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP1985000340U 1985-01-07 1985-01-07 Expired JPS6342138Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985000340U JPS6342138Y2 (enExample) 1985-01-07 1985-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985000340U JPS6342138Y2 (enExample) 1985-01-07 1985-01-07

Publications (2)

Publication Number Publication Date
JPS61116765U JPS61116765U (enExample) 1986-07-23
JPS6342138Y2 true JPS6342138Y2 (enExample) 1988-11-04

Family

ID=30472092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985000340U Expired JPS6342138Y2 (enExample) 1985-01-07 1985-01-07

Country Status (1)

Country Link
JP (1) JPS6342138Y2 (enExample)

Also Published As

Publication number Publication date
JPS61116765U (enExample) 1986-07-23

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