JPS61116765U - - Google Patents
Info
- Publication number
- JPS61116765U JPS61116765U JP34085U JP34085U JPS61116765U JP S61116765 U JPS61116765 U JP S61116765U JP 34085 U JP34085 U JP 34085U JP 34085 U JP34085 U JP 34085U JP S61116765 U JPS61116765 U JP S61116765U
- Authority
- JP
- Japan
- Prior art keywords
- swinging
- wafer carrier
- support
- pair
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000012993 chemical processing Methods 0.000 claims 3
- 230000007797 corrosion Effects 0.000 claims 3
- 238000005260 corrosion Methods 0.000 claims 3
- 238000003466 welding Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000012545 processing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010129 solution processing Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34085U JPS6342138Y2 (enExample) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34085U JPS6342138Y2 (enExample) | 1985-01-07 | 1985-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116765U true JPS61116765U (enExample) | 1986-07-23 |
| JPS6342138Y2 JPS6342138Y2 (enExample) | 1988-11-04 |
Family
ID=30472092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34085U Expired JPS6342138Y2 (enExample) | 1985-01-07 | 1985-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342138Y2 (enExample) |
-
1985
- 1985-01-07 JP JP34085U patent/JPS6342138Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6342138Y2 (enExample) | 1988-11-04 |
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