JPH03116030U - - Google Patents
Info
- Publication number
- JPH03116030U JPH03116030U JP2582990U JP2582990U JPH03116030U JP H03116030 U JPH03116030 U JP H03116030U JP 2582990 U JP2582990 U JP 2582990U JP 2582990 U JP2582990 U JP 2582990U JP H03116030 U JPH03116030 U JP H03116030U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- cassette
- wafers
- liquid processing
- wafer support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2582990U JPH03116030U (enExample) | 1990-03-14 | 1990-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2582990U JPH03116030U (enExample) | 1990-03-14 | 1990-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116030U true JPH03116030U (enExample) | 1991-12-02 |
Family
ID=31528749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2582990U Pending JPH03116030U (enExample) | 1990-03-14 | 1990-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116030U (enExample) |
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1990
- 1990-03-14 JP JP2582990U patent/JPH03116030U/ja active Pending