JPH11150064A5 - - Google Patents

Info

Publication number
JPH11150064A5
JPH11150064A5 JP1997332289A JP33228997A JPH11150064A5 JP H11150064 A5 JPH11150064 A5 JP H11150064A5 JP 1997332289 A JP1997332289 A JP 1997332289A JP 33228997 A JP33228997 A JP 33228997A JP H11150064 A5 JPH11150064 A5 JP H11150064A5
Authority
JP
Japan
Prior art keywords
substrate
processing
processing liquid
holding means
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997332289A
Other languages
English (en)
Japanese (ja)
Other versions
JP3686241B2 (ja
JPH11150064A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP33228997A priority Critical patent/JP3686241B2/ja
Priority claimed from JP33228997A external-priority patent/JP3686241B2/ja
Publication of JPH11150064A publication Critical patent/JPH11150064A/ja
Publication of JPH11150064A5 publication Critical patent/JPH11150064A5/ja
Application granted granted Critical
Publication of JP3686241B2 publication Critical patent/JP3686241B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP33228997A 1997-11-18 1997-11-18 処理方法及び処理装置 Expired - Fee Related JP3686241B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33228997A JP3686241B2 (ja) 1997-11-18 1997-11-18 処理方法及び処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33228997A JP3686241B2 (ja) 1997-11-18 1997-11-18 処理方法及び処理装置

Publications (3)

Publication Number Publication Date
JPH11150064A JPH11150064A (ja) 1999-06-02
JPH11150064A5 true JPH11150064A5 (enExample) 2004-08-26
JP3686241B2 JP3686241B2 (ja) 2005-08-24

Family

ID=18253300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33228997A Expired - Fee Related JP3686241B2 (ja) 1997-11-18 1997-11-18 処理方法及び処理装置

Country Status (1)

Country Link
JP (1) JP3686241B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488753B1 (ko) * 2001-07-23 2005-05-11 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리방법 및 그 장치
JP4718061B2 (ja) * 2001-09-11 2011-07-06 東京エレクトロン株式会社 液処理装置および液処理方法ならびに現像処理装置
JP4343025B2 (ja) 2004-05-18 2009-10-14 東京エレクトロン株式会社 現像装置及び現像方法

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