JPS61109137U - - Google Patents

Info

Publication number
JPS61109137U
JPS61109137U JP19286684U JP19286684U JPS61109137U JP S61109137 U JPS61109137 U JP S61109137U JP 19286684 U JP19286684 U JP 19286684U JP 19286684 U JP19286684 U JP 19286684U JP S61109137 U JPS61109137 U JP S61109137U
Authority
JP
Japan
Prior art keywords
semiconductor
wafers
wafer
loaded
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19286684U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19286684U priority Critical patent/JPS61109137U/ja
Publication of JPS61109137U publication Critical patent/JPS61109137U/ja
Pending legal-status Critical Current

Links

JP19286684U 1984-12-21 1984-12-21 Pending JPS61109137U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19286684U JPS61109137U (enExample) 1984-12-21 1984-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19286684U JPS61109137U (enExample) 1984-12-21 1984-12-21

Publications (1)

Publication Number Publication Date
JPS61109137U true JPS61109137U (enExample) 1986-07-10

Family

ID=30750278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19286684U Pending JPS61109137U (enExample) 1984-12-21 1984-12-21

Country Status (1)

Country Link
JP (1) JPS61109137U (enExample)

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