JPS6395241U - - Google Patents
Info
- Publication number
- JPS6395241U JPS6395241U JP19061986U JP19061986U JPS6395241U JP S6395241 U JPS6395241 U JP S6395241U JP 19061986 U JP19061986 U JP 19061986U JP 19061986 U JP19061986 U JP 19061986U JP S6395241 U JPS6395241 U JP S6395241U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- utility
- transfer device
- model registration
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- De-Stacking Of Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19061986U JPS6395241U (enExample) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19061986U JPS6395241U (enExample) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395241U true JPS6395241U (enExample) | 1988-06-20 |
Family
ID=31144009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19061986U Pending JPS6395241U (enExample) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395241U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02126648A (ja) * | 1988-11-07 | 1990-05-15 | Tokyo Electron Ltd | 処理装置 |
| JPH0366928U (enExample) * | 1989-10-31 | 1991-06-28 |
-
1986
- 1986-12-12 JP JP19061986U patent/JPS6395241U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02126648A (ja) * | 1988-11-07 | 1990-05-15 | Tokyo Electron Ltd | 処理装置 |
| JPH0366928U (enExample) * | 1989-10-31 | 1991-06-28 |