JPS63132435U - - Google Patents
Info
- Publication number
- JPS63132435U JPS63132435U JP1987022928U JP2292887U JPS63132435U JP S63132435 U JPS63132435 U JP S63132435U JP 1987022928 U JP1987022928 U JP 1987022928U JP 2292887 U JP2292887 U JP 2292887U JP S63132435 U JPS63132435 U JP S63132435U
- Authority
- JP
- Japan
- Prior art keywords
- horizontal plate
- plate portion
- wafer
- wafer carrier
- elevation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987022928U JPS63132435U (enExample) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987022928U JPS63132435U (enExample) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132435U true JPS63132435U (enExample) | 1988-08-30 |
Family
ID=30820777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987022928U Pending JPS63132435U (enExample) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132435U (enExample) |
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1987
- 1987-02-20 JP JP1987022928U patent/JPS63132435U/ja active Pending