JPS63132435U - - Google Patents
Info
- Publication number
- JPS63132435U JPS63132435U JP2292887U JP2292887U JPS63132435U JP S63132435 U JPS63132435 U JP S63132435U JP 2292887 U JP2292887 U JP 2292887U JP 2292887 U JP2292887 U JP 2292887U JP S63132435 U JPS63132435 U JP S63132435U
- Authority
- JP
- Japan
- Prior art keywords
- horizontal plate
- plate portion
- wafer
- wafer carrier
- elevation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図はウエハケースを載置したこの考案の一
実施例を示す斜視図、第２図は第１図の部分断面
図、第３図は支持板の斜視図、第４図はウエハキ
ヤリアを載置した一実施例を示す斜視図、第５図
は第４図の部分断面図である。
２…ウエハケース、２ｂ…凹部、３…コマ、３
ａ…水平板部、３ｂ，３ｃ…段差部、４…前コマ
、４ａ…中間水平板部、５…エレベーシヨン板、
６，７…ツマミ螺、８…支持板、８ｅ…ウエハキ
ヤリア位置決めコマ部、９…ウエハキヤリア、９
ａ…突起。
Figure 1 is a perspective view showing an embodiment of this invention with a wafer case placed thereon, Figure 2 is a partial sectional view of Figure 1, Figure 3 is a perspective view of the support plate, and Figure 4 shows the wafer carrier. FIG. 5 is a perspective view showing an example of the mounted embodiment, and FIG. 5 is a partial sectional view of FIG. 4. 2... Wafer case, 2b... Recess, 3... Top, 3
a...Horizontal plate part, 3b, 3c...Step part, 4...Previous frame, 4a...Intermediate horizontal plate part, 5...Elevation plate,
6, 7...Knob screw, 8...Support plate, 8e...Wafer carrier positioning piece, 9...Wafer carrier, 9
a...Protrusion.
Claims (1)
の下端縁部受入れ用の段差部を各々有する一対の
コマと、 垂直方向両端部の上向きにした方が上記ウエハ
ケースの凹部に嵌合し、上記水平板部に対応した
中間水平板部を有する前コマと、 ツマミ螺により上記コマの水平板部及び前コマ
の中間水平板部上に着脱自在に設けられるエレベ
ーシヨン板と、 該エレベーシヨン板上に着脱自在に設けられ、
上面側にウエハキヤリア下端部の突起に係合する
ウエハキヤリア位置決めコマ部を有する支持板と
を備えたウエハケース・ウエハキヤリア兼用ロー
ダ。[Scope of Claim for Utility Model Registration] A pair of frames each having a horizontal plate portion and a stepped portion on both vertical sides thereof for receiving the lower edge of the wafer case, and the wafer case having both vertical ends facing upward. a front piece that fits into the recess of the top and has an intermediate horizontal plate portion corresponding to the horizontal plate portion; and an elevation that is detachably provided on the horizontal plate portion of the top and the intermediate horizontal plate portion of the front piece by means of a knob screw. a plate, removably provided on the elevation plate,
A wafer case/wafer carrier combination loader comprising a support plate having a wafer carrier positioning piece on the upper surface side that engages with a protrusion at the lower end of the wafer carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2292887U JPS63132435U (en) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2292887U JPS63132435U (en) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132435U true JPS63132435U (en) | 1988-08-30 |
Family
ID=30820777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2292887U Pending JPS63132435U (en) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132435U (en) |
-
1987
- 1987-02-20 JP JP2292887U patent/JPS63132435U/ja active Pending