JPS6342138Y2 - - Google Patents

Info

Publication number

JPS6342138Y2

JPS6342138Y2 JP34085U JP34085U JPS6342138Y2 JP S6342138 Y2 JPS6342138 Y2 JP S6342138Y2 JP 34085 U JP34085 U JP 34085U JP 34085 U JP34085 U JP 34085U JP S6342138 Y2 JPS6342138 Y2 JP S6342138Y2

Authority

JP

Japan

Prior art keywords

support

wafer carrier

pair

corrosion

swinging

Prior art date

1985-01-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 235000012431 wafers Nutrition 0.000 claims description 38
• 238000005260 corrosion Methods 0.000 claims description 21
• 230000007797 corrosion Effects 0.000 claims description 21
• 239000000463 material Substances 0.000 claims description 15
• 238000003466 welding Methods 0.000 claims description 12
• 238000012993 chemical processing Methods 0.000 claims description 10
• 239000004065 semiconductor Substances 0.000 claims description 6
• 238000012545 processing Methods 0.000 claims description 2
• 239000000126 substance Substances 0.000 description 25
• 239000000969 carrier Substances 0.000 description 10
• 238000004140 cleaning Methods 0.000 description 9
• 239000002184 metal Substances 0.000 description 8
• 239000011248 coating agent Substances 0.000 description 4
• 238000000576 coating method Methods 0.000 description 4
• 230000000694 effects Effects 0.000 description 4
• 238000005530 etching Methods 0.000 description 3
• 239000007788 liquid Substances 0.000 description 3
• 229920005989 resin Polymers 0.000 description 3
• 239000011347 resin Substances 0.000 description 3
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
• 229910052731 fluorine Inorganic materials 0.000 description 2
• 239000011737 fluorine Substances 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 239000002351 wastewater Substances 0.000 description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
• 229910000975 Carbon steel Inorganic materials 0.000 description 1
• 239000004809 Teflon Substances 0.000 description 1
• 229920006362 Teflon® Polymers 0.000 description 1
• 230000002411 adverse Effects 0.000 description 1
• 239000010962 carbon steel Substances 0.000 description 1
• 229920006026 co-polymeric resin Polymers 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000006073 displacement reaction Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 230000003628 erosive effect Effects 0.000 description 1
• NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
• 238000012423 maintenance Methods 0.000 description 1
• 229910021645 metal ion Inorganic materials 0.000 description 1
• 239000007769 metal material Substances 0.000 description 1
• 238000010129 solution processing Methods 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000002699 waste material Substances 0.000 description 1