JPS6338874B2 - - Google Patents
Info
- Publication number
- JPS6338874B2 JPS6338874B2 JP57061765A JP6176582A JPS6338874B2 JP S6338874 B2 JPS6338874 B2 JP S6338874B2 JP 57061765 A JP57061765 A JP 57061765A JP 6176582 A JP6176582 A JP 6176582A JP S6338874 B2 JPS6338874 B2 JP S6338874B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- semiconductor device
- insulating material
- stainless steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 53
- 239000011810 insulating material Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 230000003746 surface roughness Effects 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 3
- 239000002952 polymeric resin Substances 0.000 claims description 3
- 229920003002 synthetic resin Polymers 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 7
- 239000010408 film Substances 0.000 description 34
- 239000011347 resin Substances 0.000 description 33
- 229920005989 resin Polymers 0.000 description 33
- 229910001220 stainless steel Inorganic materials 0.000 description 22
- 239000010935 stainless steel Substances 0.000 description 22
- 239000010409 thin film Substances 0.000 description 14
- 229910021417 amorphous silicon Inorganic materials 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 231100000241 scar Toxicity 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 208000032544 Cicatrix Diseases 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000037387 scars Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000005028 tinplate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic System
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57061765A JPS58180069A (ja) | 1982-04-15 | 1982-04-15 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57061765A JPS58180069A (ja) | 1982-04-15 | 1982-04-15 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58180069A JPS58180069A (ja) | 1983-10-21 |
JPS6338874B2 true JPS6338874B2 (fr) | 1988-08-02 |
Family
ID=13180541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57061765A Granted JPS58180069A (ja) | 1982-04-15 | 1982-04-15 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58180069A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010287715A (ja) * | 2009-06-11 | 2010-12-24 | Mitsubishi Electric Corp | 薄膜太陽電池およびその製造方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IN162671B (fr) * | 1984-03-05 | 1988-06-25 | Energy Conversion Devices Inc | |
JPS6115763U (ja) * | 1984-07-02 | 1986-01-29 | 太陽誘電株式会社 | マイカ成形基板を使用した薄膜素子 |
JP2784841B2 (ja) * | 1990-08-09 | 1998-08-06 | キヤノン株式会社 | 太陽電池用基板 |
JP2908067B2 (ja) * | 1991-05-09 | 1999-06-21 | キヤノン株式会社 | 太陽電池用基板および太陽電池 |
FR2690279B1 (fr) * | 1992-04-15 | 1997-10-03 | Picogiga Sa | Composant photovoltauique multispectral. |
US7354462B2 (en) | 2002-10-04 | 2008-04-08 | Chevron U.S.A. Inc. | Systems and methods of improving diesel fuel performance in cold climates |
KR101608953B1 (ko) | 2007-11-09 | 2016-04-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 광전 변환 장치 및 그 제조 방법 |
US20090139558A1 (en) * | 2007-11-29 | 2009-06-04 | Shunpei Yamazaki | Photoelectric conversion device and manufacturing method thereof |
-
1982
- 1982-04-15 JP JP57061765A patent/JPS58180069A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010287715A (ja) * | 2009-06-11 | 2010-12-24 | Mitsubishi Electric Corp | 薄膜太陽電池およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS58180069A (ja) | 1983-10-21 |
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