JPS6337615A - プラズマ電極 - Google Patents

プラズマ電極

Info

Publication number
JPS6337615A
JPS6337615A JP18090886A JP18090886A JPS6337615A JP S6337615 A JPS6337615 A JP S6337615A JP 18090886 A JP18090886 A JP 18090886A JP 18090886 A JP18090886 A JP 18090886A JP S6337615 A JPS6337615 A JP S6337615A
Authority
JP
Japan
Prior art keywords
electrode
quartz
plasma
electrode plates
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18090886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556853B2 (esLanguage
Inventor
Shigeru Kawamura
茂 川村
Naruhito Ibuka
井深　成仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP18090886A priority Critical patent/JPS6337615A/ja
Publication of JPS6337615A publication Critical patent/JPS6337615A/ja
Publication of JPH0556853B2 publication Critical patent/JPH0556853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP18090886A 1986-07-31 1986-07-31 プラズマ電極 Granted JPS6337615A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18090886A JPS6337615A (ja) 1986-07-31 1986-07-31 プラズマ電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18090886A JPS6337615A (ja) 1986-07-31 1986-07-31 プラズマ電極

Publications (2)

Publication Number Publication Date
JPS6337615A true JPS6337615A (ja) 1988-02-18
JPH0556853B2 JPH0556853B2 (esLanguage) 1993-08-20

Family

ID=16091400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18090886A Granted JPS6337615A (ja) 1986-07-31 1986-07-31 プラズマ電極

Country Status (1)

Country Link
JP (1) JPS6337615A (esLanguage)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4955649A (en) * 1988-02-29 1990-09-11 Tel Sagami Limited Apparatus for holding plates
US9108804B2 (en) 2011-09-16 2015-08-18 Wamgroup S.P.A. Screw conveyor intermediate support

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784137A (en) * 1980-11-14 1982-05-26 Matsushita Electric Ind Co Ltd Plasma chemical evaporation
JPS6157517U (esLanguage) * 1984-09-19 1986-04-17
JPS61116843A (ja) * 1984-11-13 1986-06-04 Sharp Corp 絶縁薄膜の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784137A (en) * 1980-11-14 1982-05-26 Matsushita Electric Ind Co Ltd Plasma chemical evaporation
JPS6157517U (esLanguage) * 1984-09-19 1986-04-17
JPS61116843A (ja) * 1984-11-13 1986-06-04 Sharp Corp 絶縁薄膜の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4955649A (en) * 1988-02-29 1990-09-11 Tel Sagami Limited Apparatus for holding plates
US9108804B2 (en) 2011-09-16 2015-08-18 Wamgroup S.P.A. Screw conveyor intermediate support

Also Published As

Publication number Publication date
JPH0556853B2 (esLanguage) 1993-08-20

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