JPS6337079B2 - - Google Patents

Info

Publication number
JPS6337079B2
JPS6337079B2 JP58160071A JP16007183A JPS6337079B2 JP S6337079 B2 JPS6337079 B2 JP S6337079B2 JP 58160071 A JP58160071 A JP 58160071A JP 16007183 A JP16007183 A JP 16007183A JP S6337079 B2 JPS6337079 B2 JP S6337079B2
Authority
JP
Japan
Prior art keywords
wafer
molybdenum block
temperature
molybdenum
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58160071A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6051696A (ja
Inventor
Haruo Tanaka
Masahito Mushigami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP16007183A priority Critical patent/JPS6051696A/ja
Publication of JPS6051696A publication Critical patent/JPS6051696A/ja
Publication of JPS6337079B2 publication Critical patent/JPS6337079B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16007183A 1983-08-30 1983-08-30 分子線エピタキシャル装置のウエハ装着構造 Granted JPS6051696A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16007183A JPS6051696A (ja) 1983-08-30 1983-08-30 分子線エピタキシャル装置のウエハ装着構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16007183A JPS6051696A (ja) 1983-08-30 1983-08-30 分子線エピタキシャル装置のウエハ装着構造

Publications (2)

Publication Number Publication Date
JPS6051696A JPS6051696A (ja) 1985-03-23
JPS6337079B2 true JPS6337079B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-22

Family

ID=15707254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16007183A Granted JPS6051696A (ja) 1983-08-30 1983-08-30 分子線エピタキシャル装置のウエハ装着構造

Country Status (1)

Country Link
JP (1) JPS6051696A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140771U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-03-18 1989-09-27

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519820B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-07-14 1976-03-30
US4159919A (en) * 1978-01-16 1979-07-03 Bell Telephone Laboratories, Incorporated Molecular beam epitaxy using premixing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140771U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-03-18 1989-09-27

Also Published As

Publication number Publication date
JPS6051696A (ja) 1985-03-23

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