JPS6333094B2 - - Google Patents

Info

Publication number
JPS6333094B2
JPS6333094B2 JP53104604A JP10460478A JPS6333094B2 JP S6333094 B2 JPS6333094 B2 JP S6333094B2 JP 53104604 A JP53104604 A JP 53104604A JP 10460478 A JP10460478 A JP 10460478A JP S6333094 B2 JPS6333094 B2 JP S6333094B2
Authority
JP
Japan
Prior art keywords
pattern
printed board
mask
width
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53104604A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5530872A (en
Inventor
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10460478A priority Critical patent/JPS5530872A/ja
Publication of JPS5530872A publication Critical patent/JPS5530872A/ja
Publication of JPS6333094B2 publication Critical patent/JPS6333094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10460478A 1978-08-28 1978-08-28 Method of inspecting printed board pattern Granted JPS5530872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10460478A JPS5530872A (en) 1978-08-28 1978-08-28 Method of inspecting printed board pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10460478A JPS5530872A (en) 1978-08-28 1978-08-28 Method of inspecting printed board pattern

Publications (2)

Publication Number Publication Date
JPS5530872A JPS5530872A (en) 1980-03-04
JPS6333094B2 true JPS6333094B2 (enrdf_load_stackoverflow) 1988-07-04

Family

ID=14385015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10460478A Granted JPS5530872A (en) 1978-08-28 1978-08-28 Method of inspecting printed board pattern

Country Status (1)

Country Link
JP (1) JPS5530872A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204086A1 (de) * 1982-02-06 1983-08-11 Ibm Deutschland Gmbh, 7000 Stuttgart Vorrichtung zur automatischen optischen beschaffenheitspruefung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154683U (enrdf_load_stackoverflow) * 1974-10-24 1976-04-26
JPS5854364B2 (ja) * 1975-07-10 1983-12-05 トウキヨウコウガクキカイ カブシキガイシヤ イソウコウゾウブツタイノカンサツホウホウ
JPS5282859U (enrdf_load_stackoverflow) * 1975-12-18 1977-06-21

Also Published As

Publication number Publication date
JPS5530872A (en) 1980-03-04

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