JPS5530872A - Method of inspecting printed board pattern - Google Patents

Method of inspecting printed board pattern

Info

Publication number
JPS5530872A
JPS5530872A JP10460478A JP10460478A JPS5530872A JP S5530872 A JPS5530872 A JP S5530872A JP 10460478 A JP10460478 A JP 10460478A JP 10460478 A JP10460478 A JP 10460478A JP S5530872 A JPS5530872 A JP S5530872A
Authority
JP
Japan
Prior art keywords
printed board
board pattern
inspecting printed
inspecting
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10460478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6333094B2 (enrdf_load_stackoverflow
Inventor
Sanetoshi Andou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10460478A priority Critical patent/JPS5530872A/ja
Publication of JPS5530872A publication Critical patent/JPS5530872A/ja
Publication of JPS6333094B2 publication Critical patent/JPS6333094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10460478A 1978-08-28 1978-08-28 Method of inspecting printed board pattern Granted JPS5530872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10460478A JPS5530872A (en) 1978-08-28 1978-08-28 Method of inspecting printed board pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10460478A JPS5530872A (en) 1978-08-28 1978-08-28 Method of inspecting printed board pattern

Publications (2)

Publication Number Publication Date
JPS5530872A true JPS5530872A (en) 1980-03-04
JPS6333094B2 JPS6333094B2 (enrdf_load_stackoverflow) 1988-07-04

Family

ID=14385015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10460478A Granted JPS5530872A (en) 1978-08-28 1978-08-28 Method of inspecting printed board pattern

Country Status (1)

Country Link
JP (1) JPS5530872A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146844A (ja) * 1982-02-06 1983-09-01 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 自動光学特性検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154683U (enrdf_load_stackoverflow) * 1974-10-24 1976-04-26
JPS528839A (en) * 1975-07-10 1977-01-24 Tokyo Optical Co Ltd Observation method regarding phase structural body
JPS5282859U (enrdf_load_stackoverflow) * 1975-12-18 1977-06-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154683U (enrdf_load_stackoverflow) * 1974-10-24 1976-04-26
JPS528839A (en) * 1975-07-10 1977-01-24 Tokyo Optical Co Ltd Observation method regarding phase structural body
JPS5282859U (enrdf_load_stackoverflow) * 1975-12-18 1977-06-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146844A (ja) * 1982-02-06 1983-09-01 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 自動光学特性検査装置

Also Published As

Publication number Publication date
JPS6333094B2 (enrdf_load_stackoverflow) 1988-07-04

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