JPS6332934Y2 - - Google Patents

Info

Publication number
JPS6332934Y2
JPS6332934Y2 JP5263984U JP5263984U JPS6332934Y2 JP S6332934 Y2 JPS6332934 Y2 JP S6332934Y2 JP 5263984 U JP5263984 U JP 5263984U JP 5263984 U JP5263984 U JP 5263984U JP S6332934 Y2 JPS6332934 Y2 JP S6332934Y2
Authority
JP
Japan
Prior art keywords
vacuum
vacuum container
intake valve
intake
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5263984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60164684U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5263984U priority Critical patent/JPS60164684U/ja
Publication of JPS60164684U publication Critical patent/JPS60164684U/ja
Application granted granted Critical
Publication of JPS6332934Y2 publication Critical patent/JPS6332934Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5263984U 1984-04-12 1984-04-12 真空装置 Granted JPS60164684U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5263984U JPS60164684U (ja) 1984-04-12 1984-04-12 真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5263984U JPS60164684U (ja) 1984-04-12 1984-04-12 真空装置

Publications (2)

Publication Number Publication Date
JPS60164684U JPS60164684U (ja) 1985-11-01
JPS6332934Y2 true JPS6332934Y2 (enrdf_load_stackoverflow) 1988-09-02

Family

ID=30572771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5263984U Granted JPS60164684U (ja) 1984-04-12 1984-04-12 真空装置

Country Status (1)

Country Link
JP (1) JPS60164684U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS60164684U (ja) 1985-11-01

Similar Documents

Publication Publication Date Title
JPS6332934Y2 (enrdf_load_stackoverflow)
JPS6332935Y2 (enrdf_load_stackoverflow)
JPS59133365A (ja) 真空装置
JP2881154B2 (ja) 真空排気装置
JP2735231B2 (ja) 半導体製造装置
JP2515669B2 (ja) 真空ポンプ
CN221346723U (zh) 一种负压门辅助开启结构
JPS6236737B2 (enrdf_load_stackoverflow)
JPS5967849U (ja) 真空排気系の防振装置
JPH0240310Y2 (enrdf_load_stackoverflow)
JPH05237361A (ja) 真空用バルブ
JPS6447994U (enrdf_load_stackoverflow)
JPH0245920A (ja) 半導体製造装置
JPH01134782U (enrdf_load_stackoverflow)
JPH06256948A (ja) 真空処理装置
JPH041349Y2 (enrdf_load_stackoverflow)
JPS6138964U (ja) ガスレ−ザ発振器
JPH03161042A (ja) 真空排気系
JPS611485A (ja) 電子ビ−ム溶接装置
JPH01239751A (ja) 真空装置における排気系
JPS6198868U (enrdf_load_stackoverflow)
JPS60121478U (ja) 電子ビ−ム加工機
JPS5971980U (ja) 真空排気系
JPS61178405A (ja) 窒素発生装置の吸着剤再生方法
JPS5967590U (ja) 高真空排気装置