JPS6332934Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] This invention relates to an intake mechanism for sucking air into a vacuum container.

[Conventional technology]

FIG. 2 shows a schematic configuration of a conventional vacuum device. In the figure, 1 is a vacuum container, 2 is a vacuum container 1
3 is a vacuum valve that connects the vacuum container 1 and the vacuum pump 2; 4 is an intake valve that sucks air into the vacuum container 1 (hereinafter referred to as intake valve 1); 5 is a muffler for reducing noise during intake.

When evacuating the inside of the vacuum container 1, the intake valve 14 is closed to cut off the path between the inside of the vacuum container 1 and the atmosphere. Next, open the vacuum valve 3 and open the vacuum container 1.
Connect the path between the inside of the unit and the vacuum evacuation device 2,
The vacuum evacuation device 2 is operated to evacuate the inside of the vacuum container 1 to a predetermined vacuum pressure.

When the inside of the vacuum container 1 is brought to atmospheric pressure, the vacuum valve 3 is closed, the path between the inside of the vacuum container 1 and the evacuation device 2 is cut off, and the evacuation device 2 is stopped.
Next, when the intake valve 14 is opened and the path between the inside of the vacuum container 1 and the atmosphere is connected, air flows into the vacuum container 1 and the inside of the vacuum container 1 becomes atmospheric pressure. At this time, noise is generated by the air flowing into the vacuum container 1, so the noise is suppressed to a relatively small level by the muffler 5.

Since the conventional vacuum device is configured and operated as described above, when air is taken into the vacuum container 1, the resistance of the intake valve 14 is present in the path between the inside of the vacuum container 1 and the atmosphere. Since there is a muffler 5 which has a larger resistance than the intake valve 14, the flow rate of atmospheric air flowing into the interior of the vacuum container 1 is restricted. As the pressure difference between the atmospheric pressure and the inside of the vacuum container 1 decreases, the flow rate of air flowing into the vacuum container 1 decreases, so the pressure inside the vacuum container 1 decreases from a predetermined vacuum pressure to atmospheric pressure. There was a drawback that the time (hereinafter referred to as inhalation time) became long.

[Summary of the idea]

This invention was made in order to eliminate the above-mentioned drawbacks of the conventional device, and aims to provide a vacuum device that can shorten the intake time by further providing a second intake valve in the vacuum container.

[Example of idea]

Hereinafter, embodiments of this invention will be described with reference to the drawings. In FIG. 1, 6 is a second intake valve (hereinafter referred to as intake valve 2), which has one end connected to the vacuum vessel 1 and the other end opened directly to the atmosphere.

The operation for evacuating the inside of the vacuum container 1 is the same as that of the conventional device, except that when the intake valve 14 is closed, the intake valve 26 is also closed at the same time, so a description thereof will be omitted.

Next, when bringing the inside of the vacuum container 1 to atmospheric pressure, first close the vacuum valve 3 to cut off the path between the inside of the vacuum container 1 and the vacuum evacuation device 2, and stop the vacuum evacuation device 2. do. Next, when the intake valve 14 is opened and the path between the inside of the vacuum container 1 and the atmosphere is connected, air flows into the inside of the vacuum container 1 and the pressure inside the vacuum container 1 increases. At this time, when the pressure inside the vacuum container 1 becomes close to atmospheric pressure, the intake valve 26 is opened to compensate for the decrease in the amount of air flowing into the vacuum container 1 through the intake valve 14, and the silencer 5 is opened. Air is caused to flow into the interior of the vacuum container 1 through the intake valve 26 whose resistance is smaller than that of the vacuum chamber 1.

[Effect of idea]

As described above, according to this invention, in addition to the intake valve 14 to which the silencer 5 is connected, the intake valve 26 with one end open to the atmosphere is connected to the vacuum vessel 1, so that the intake time can be reliably shortened by several seconds. .

In particular, in the mass production department of electron beam welding machines, which use vacuum equipment,
The time required for each process, such as evacuation of the vacuum processing chamber, welding, air intake into the vacuum processing chamber, and removal of the workpiece, is approximately 10 seconds, so by shortening the intake time by 2 to 3 seconds. Since the time required for one process can be reduced by 20 to 30%, productivity can be greatly improved.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of a vacuum device showing an embodiment of this invention, and FIG. 2 is a schematic configuration diagram of a conventional vacuum device. 1... Vacuum container, 2... Vacuum exhaust device, 3...
Vacuum valve, 4... Intake valve 1, 5... Silencer, 6...
Intake valve 2. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

[Scope of utility model registration request] In a vacuum device consisting of a vacuum container, a vacuum evacuation device that evacuates the inside of the vacuum container, an intake valve that sucks air into the vacuum container, and a silencer that reduces noise during intake, there is a A vacuum device characterized by having two intake valves.