JPS63304659A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS63304659A JPS63304659A JP62140225A JP14022587A JPS63304659A JP S63304659 A JPS63304659 A JP S63304659A JP 62140225 A JP62140225 A JP 62140225A JP 14022587 A JP14022587 A JP 14022587A JP S63304659 A JPS63304659 A JP S63304659A
- Authority
- JP
- Japan
- Prior art keywords
- region
- buried layer
- conductivity type
- epitaxial layer
- base region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 abstract description 5
- 239000007924 injection Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 3
- 230000002441 reversible effect Effects 0.000 description 7
- 238000002955 isolation Methods 0.000 description 5
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910019213 POCl3 Inorganic materials 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62140225A JPS63304659A (ja) | 1987-06-03 | 1987-06-03 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62140225A JPS63304659A (ja) | 1987-06-03 | 1987-06-03 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63304659A true JPS63304659A (ja) | 1988-12-12 |
| JPH0581191B2 JPH0581191B2 (enExample) | 1993-11-11 |
Family
ID=15263817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62140225A Granted JPS63304659A (ja) | 1987-06-03 | 1987-06-03 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63304659A (enExample) |
-
1987
- 1987-06-03 JP JP62140225A patent/JPS63304659A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0581191B2 (enExample) | 1993-11-11 |
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