JPS63295167A - ダイヤフラムの製造方法 - Google Patents

ダイヤフラムの製造方法

Info

Publication number
JPS63295167A
JPS63295167A JP10272288A JP10272288A JPS63295167A JP S63295167 A JPS63295167 A JP S63295167A JP 10272288 A JP10272288 A JP 10272288A JP 10272288 A JP10272288 A JP 10272288A JP S63295167 A JPS63295167 A JP S63295167A
Authority
JP
Japan
Prior art keywords
round hole
roundness
diaphragm
radius
round
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10272288A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565313B2 (enExample
Inventor
Masaaki Kuniyoshi
国吉　真暁
Shigeru Fujimoto
茂 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP10272288A priority Critical patent/JPS63295167A/ja
Publication of JPS63295167A publication Critical patent/JPS63295167A/ja
Publication of JPH0565313B2 publication Critical patent/JPH0565313B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Pressure Sensors (AREA)
JP10272288A 1988-04-27 1988-04-27 ダイヤフラムの製造方法 Granted JPS63295167A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10272288A JPS63295167A (ja) 1988-04-27 1988-04-27 ダイヤフラムの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10272288A JPS63295167A (ja) 1988-04-27 1988-04-27 ダイヤフラムの製造方法

Publications (2)

Publication Number Publication Date
JPS63295167A true JPS63295167A (ja) 1988-12-01
JPH0565313B2 JPH0565313B2 (enExample) 1993-09-17

Family

ID=14335160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10272288A Granted JPS63295167A (ja) 1988-04-27 1988-04-27 ダイヤフラムの製造方法

Country Status (1)

Country Link
JP (1) JPS63295167A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007019461A (ja) * 2005-04-27 2007-01-25 Disco Abrasive Syst Ltd ウェーハの加工方法及びウェーハ
JP2008130808A (ja) * 2006-11-21 2008-06-05 Disco Abrasive Syst Ltd 研削加工方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007019461A (ja) * 2005-04-27 2007-01-25 Disco Abrasive Syst Ltd ウェーハの加工方法及びウェーハ
JP2008130808A (ja) * 2006-11-21 2008-06-05 Disco Abrasive Syst Ltd 研削加工方法

Also Published As

Publication number Publication date
JPH0565313B2 (enExample) 1993-09-17

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