JPS632875A

JPS632875A - セラミックスのメタライズ方法

セラミックスのメタライズ方法

Info

Publication number: JPS632875A
Authority: JP; Japan
Prior art keywords: ceramics; silicon carbide; copper; layer; metallized layer
Prior art date: 1987-06-27
Legal status : Granted

Application number

JP16076987A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6356195B2 (enrdf_load_stackoverflow

Inventor

江畑　儀弘

木下　実

速水　諒三

玉利　信幸

樋端　保夫

Current Assignee

National Institute of Advanced Industrial Science and Technology AIST

Original Assignee

Agency of Industrial Science and Technology

Priority date

1987-06-27

Filing date

1987-06-27

Publication date

1988-01-07

1987-06-27 Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology

1987-06-27 Priority to JP16076987A priority Critical patent/JPS632875A/ja

1988-01-07 Publication of JPS632875A publication Critical patent/JPS632875A/ja

1988-11-07 Publication of JPS6356195B2 publication Critical patent/JPS6356195B2/ja

Status Granted legal-status Critical Current

Links

239000000919 ceramic Substances 0.000 title claims description 30
238000001465 metallisation Methods 0.000 title description 2
238000000034 method Methods 0.000 claims description 21
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 20
229910010271 silicon carbide Inorganic materials 0.000 claims description 14
QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 13
239000005751 Copper oxide Substances 0.000 claims description 11
229910052581 Si3N4 Inorganic materials 0.000 claims description 11
239000012298 atmosphere Substances 0.000 claims description 11
229910000431 copper oxide Inorganic materials 0.000 claims description 11
OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 claims description 11
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
239000000203 mixture Substances 0.000 claims description 9
238000010438 heat treatment Methods 0.000 claims description 8
230000001590 oxidative effect Effects 0.000 claims description 7
239000011248 coating agent Substances 0.000 claims description 5
238000000576 coating method Methods 0.000 claims description 5
239000010410 layer Substances 0.000 description 25
239000011247 coating layer Substances 0.000 description 11
238000005299 abrasion Methods 0.000 description 9
239000000853 adhesive Substances 0.000 description 7
230000001070 adhesive effect Effects 0.000 description 7
229910052751 metal Inorganic materials 0.000 description 7
239000002184 metal Substances 0.000 description 7
239000000843 powder Substances 0.000 description 6
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
229910052802 copper Inorganic materials 0.000 description 5
239000010949 copper Substances 0.000 description 5
239000005749 Copper compound Substances 0.000 description 4
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
150000001880 copper compounds Chemical class 0.000 description 4
239000002904 solvent Substances 0.000 description 4
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
239000000463 material Substances 0.000 description 3
235000007173 Abies balsamea Nutrition 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
239000004857 Balsam Substances 0.000 description 2
LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
244000018716 Impatiens biflora Species 0.000 description 2
CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
238000005219 brazing Methods 0.000 description 2
238000007796 conventional method Methods 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000007654 immersion Methods 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
230000035515 penetration Effects 0.000 description 2
229910000679 solder Inorganic materials 0.000 description 2
ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
240000007182 Ochroma pyramidale Species 0.000 description 1
NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 1
239000011230 binding agent Substances 0.000 description 1
229910002090 carbon oxide Inorganic materials 0.000 description 1
239000004020 conductor Substances 0.000 description 1
PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
229910052878 cordierite Inorganic materials 0.000 description 1
238000000354 decomposition reaction Methods 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
150000004678 hydrides Chemical class 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
238000009413 insulation Methods 0.000 description 1
239000000395 magnesium oxide Substances 0.000 description 1
229910052863 mullite Inorganic materials 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
239000011225 non-oxide ceramic Substances 0.000 description 1
239000003921 oil Substances 0.000 description 1
229910052574 oxide ceramic Inorganic materials 0.000 description 1
239000011224 oxide ceramic Substances 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
230000003014 reinforcing effect Effects 0.000 description 1
230000035939 shock Effects 0.000 description 1
-1 sialon Chemical compound 0.000 description 1
229910001958 silver carbonate Inorganic materials 0.000 description 1
LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
239000000126 substance Substances 0.000 description 1
229910052717 sulfur Inorganic materials 0.000 description 1
239000011593 sulfur Substances 0.000 description 1